Esihlokweni esandulele, sikhulume ngezici zokugqoka ezikhipha umoya, futhi lesi sihloko sizoqhubeka nokuchaza izici zokugqoka ezikhipha umoya.
(4) Izinga lokushisa le-substrate liphansi. Izinga lokuphalaza lokuphalaza liphezulu ngoba ukugcwala kwama-electron kuphezulu ngaphakathi kwesifunda sensimu yamagnetic sethagethi ye-cathode, okungukuthi, endaweni encane yendawo esendleleni yokukhipha okuqondiwe, nangaphandle kwesifunda sesenzo samagnetic, ikakhulukazi eduze kobuso be-substrate kude nensimu yamagnetic, ukugcwala kwama-electron kuphansi kakhulu ngenxa yokwehluka, futhi kungase kube ngaphansi ngisho nangokwe-binary sputtering (ngoba ingcindezi yegesi yokusebenza yalezi zibili ihlukile kakhulu). Ngakho-ke, ngaphansi kwezimo zokuphalaza, ukugcwala kwama-electron ebusweni be-substrate ebhomu kuphansi kakhulu kunalokho ekuphalazeni okuvamile kwesibili, futhi ukwanda ngokweqile kwezinga lokushisa le-substrate kuyagwenywa ngenxa yokwehla kwenani lama-electron ku-substrate yesigameko. Ngaphezu kwalokho, endleleni yokubhoboza, i-anode yedivayisi yokubhoboza ingatholakala eduze kwe-cathode, futhi uhlaka lwe-substrate lungaba namandla amisiwe, ukuze ama-electron akwazi ukugeleza nge-anode ngaphandle kokudlula ohlakeni lwe-substrate olusekelwe phansi, ngaleyo ndlela kuncishiswe ama-electron anamandla aphezulu abhoboza i-substrate efakwe ipulasitiki, kuncishiswe ukwanda kokushisa kwe-substrate okubangelwa ukwanda kwama-electron, futhi kuncishiswe kakhulu ukushisa okubangelwa ukubhoboza kwe-electron yesibili ye-substrate.
(5) Ukuqoshwa okungalingani kwethagethi. Kuthagethi yendabuko yokuqoshwa, kusetshenziswa insimu yamagnetic engalingani, ngakho-ke i-plasma izokhiqiza umphumela wokuhlangana kwendawo, okuzokwenza izinga lokuqoshwa kokuqoshwa kwendawo endaweni ekuhlosiwe libe likhulu kakhulu, futhi umphumela uzoba ukuqoshwa okungalingani okukhulu ekuhlosweni. Izinga lokusetshenziswa kwezinto ezihlosiwe ngokuvamile licishe libe ngu-30%. Ukuze kuthuthukiswe izinga lokusetshenziswa kwezinto ezihlosiwe, kungathathwa izinyathelo ezahlukahlukene zokuthuthukisa, njengokuthuthukisa ukuma nokusatshalaliswa kwensimu yamagnetic ehlosiwe, ukuze imagnethi ihambe ngaphakathi kwe-cathode ekuhlosiwe.
(6) Ukuphalaza okuqondiwe kwezinto ezisebenzisa ugesi kunzima. Uma okuqondiwe okusebenzisa ugesi kwenziwa ngezinto ezivumela ugesi ophezulu, imigqa yensimu yamagnetic izodlula ngqo njalo njalo. Isekethe emfushane yamagnetic yenzeka ngaphakathi kokuqondiwe, okwenza kube nzima ukukhipha. Ukuze kukhiqizwe insimu yamagnetic yendawo, kuye kwenziwa izifundo ezahlukahlukene, isibonelo, ukugcwala insimu yamagnetic ngaphakathi kokuqondiwe, okushiya izikhala eziningi ekuqondisweni ukuze kukhuthazwe ukukhiqiza amandla ogesi amaningi okuvuza ukuze kwandiswe izinga lokushisa lokuqondiwe, noma ukunciphisa amandla ogesi okuqondiwe.
– Lesi sihloko sikhishwe yi-umenzi womshini wokumboza nge-vacuumI-Guangdong Zhenhua
Isikhathi sokuthunyelwe: Septhemba-08-2023