Muchinyorwa chakapfuura, takataura nezvehunhu hwemachira ekuputira, uye chinyorwa chino chicharamba chichitsanangura hunhu hwemachira ekuputira.
(4) Tembiricha ye substrate yakaderera. Mwero wekupfapfaidza kwe sputtering wakakwira nekuti huwandu hwema electron hwakakwira mukati menzvimbo yema magnetic field ye cathode target, ndiko kuti, munzvimbo diki yemunharaunda iri panzira yekubuditsa target, uye kunze kwenzvimbo ye magnetic action, kunyanya pedyo ne substrate surface kure ne magnetic field, huwandu hwema electron hwakaderera zvikuru nekuda kwekusiyana, uye hunogona kutove hwakaderera pane hwe binary sputtering (nekuti kumanikidzwa kwegasi rekushanda kwevaviri kwakasiyana zvakanyanya). Saka, pasi pemamiriro ekupfapfaidza, huwandu hwema electron pamusoro pe substrate yakabhombwa hwakaderera zvikuru pane hwe secondary sputtering, uye kuwedzera kwakanyanya kwekushisa kwe substrate kunodziviswa nekuda kwekuderera kwehuwandu hwema electron mu incident substrate. Pamusoro pezvo, munzira yekusputtering, anode yechishandiso chekusputtering inogona kuwanikwa yakatenderedza cathode, uye substrate frame inogonawo kuva uye pa suspended potential, kuitira kuti maerekitironi agone kuyerera nepaanode asingapfuure nepa grounded substrate frame, nokudaro zvichideredza maerekitironi ane simba rakawanda anoputira substrate yakapetwa, zvichideredza kuwedzera kwekupisa kwe substrate kunokonzerwa nekuwanda kwemaerekitironi, uye zvichideredza zvakanyanya kupisa kunokonzerwa nekuputira kwemaerekitironi echipiri e substrate.
(5) Kuchekwa kusina kuenzana kwechinangwa. Muchinangwa chekare chekuchekwa, simba remagineti risingawirirane rinoshandiswa, saka plasma ichaburitsa mhedzisiro yekubatana kwenzvimbo, izvo zvichaita kuti chiyero chekuchekwa kwenzvimbo yenzvimbo pachinangwa chive chakakura zvakanyanya, uye mhedzisiro yacho ichave chiyero chakakosha chekuchekwa kusina kuenzana pachinangwa. Chiyero chekushandiswa kwezvinhu zvechinangwa chinowanzova 30%. Kuti pave nekuwedzera chiyero chekushandiswa kwezvinhu zvechinangwa, matanho akasiyana-siyana ekuvandudza anogona kutorwa, akadai sekuvandudza chimiro nekupararira kwesimba remagineti, kuitira kuti magineti afambe mukati me cathode yechinangwa.
(6) Kusvetukira kwechinhu chine magineti kwakaoma. Kana chinhu chinosvetukira chakagadzirwa nezvinhu zvine magineti akawanda, mitsetse yemagetsi inodarika zvakananga nezvimwewo. Dunhu pfupi remagineti rinoitika mukati mechinhu chinosvetukira, zvichiita kuti kuburitsa zvinhu kuve kwakaoma. Kuti pagadzirwe nzvimbo ine magineti, zvidzidzo zvakasiyana-siyana zvakaitwa, semuenzaniso, kugutsa simba remagineti riri mukati mechinhu chinosvetukira, zvichisiya mipata yakawanda pachinosvetukira kuti chiwedzere kusvetukira kwechinhu chinosvetukira, kana kuderedza kusvetukira kwechinhu chinosvetukira.
- Nyaya iyi yakaburitswa namugadziri wemuchina wevacuum coatingGuangdong Zhenhua
Nguva yekutumira: Gunyana-08-2023