Hauv tsab xov xwm dhau los, peb tau tham txog cov yam ntxwv ntawm cov txheej txheem sputtering, thiab tsab xov xwm no yuav txuas ntxiv piav qhia txog cov yam ntxwv ntawm cov txheej txheem sputtering.
(4) Qhov kub ntawm lub substrate qis. Qhov nrawm ntawm sputtering siab vim tias qhov concentration ntawm electrons siab hauv thaj chaw magnetic ntawm lub cathode target, uas yog, nyob rau hauv ib cheeb tsam me me ntawm lub hom phiaj tso tawm, thiab sab nraum thaj chaw magnetic, tshwj xeeb tshaj yog nyob ze ntawm qhov chaw substrate deb ntawm lub magnetic field, qhov electron concentration qis dua vim muaj kev sib txawv, thiab tej zaum yuav qis dua li ntawm binary sputtering (vim tias qhov siab ntawm cov roj ua haujlwm ntawm ob yog qhov sib txawv). Yog li ntawd, nyob rau hauv cov xwm txheej sputtering, qhov electron concentration ntawm qhov chaw ntawm lub substrate bombarded qis dua li ntawm qhov hauv kev sib tw theem nrab, thiab qhov nce ntxiv ntawm qhov kub ntawm lub substrate raug zam vim qhov txo qis ntawm cov electrons hauv qhov xwm txheej substrate. Ntxiv mus, nyob rau hauv txoj kev sputtering, lub anode ntawm lub cuab yeej sputtering tuaj yeem nyob ib puag ncig lub cathode, thiab lub thav duab substrate kuj tuaj yeem ua tau thiab ntawm lub peev xwm ncua, yog li ntawd cov electrons tuaj yeem ntws mus los ntawm lub anode yam tsis tau dhau los ntawm lub thav duab substrate grounded, yog li txo cov electrons muaj zog uas bombard lub plated substrate, txo qhov nce ntawm substrate cua sov los ntawm electron incidence, thiab txo qhov kub los ntawm secondary electron bombardment ntawm lub substrate.
(5) Kev txiav tsis sib xws ntawm lub hom phiaj. Hauv cov hom phiaj sputtering ib txwm muaj, siv lub zog sib nqus tsis sib xws, yog li cov plasma yuav tsim cov nyhuv sib sau ua ke hauv zos, uas yuav ua rau qhov nrawm ntawm qhov chaw hauv zos ntawm lub hom phiaj loj heev, thiab qhov tshwm sim yuav yog qhov tseem ceeb ntawm kev txiav tsis sib xws ntawm lub hom phiaj. Kev siv cov khoom siv feem ntau yog li 30%. Txhawm rau txhim kho qhov nrawm ntawm kev siv cov khoom siv, ntau yam kev ntsuas txhim kho tuaj yeem ua tau, xws li txhim kho cov duab thiab kev faib tawm ntawm lub zog sib nqus, kom lub hlau nplaum txav mus rau hauv lub hom phiaj cathode.
(6) Lub hom phiaj ntawm cov khoom siv hlau nplaum uas tawg yog qhov nyuaj. Yog tias lub hom phiaj tawg yog ua los ntawm cov khoom siv uas muaj cov permeability siab, cov kab sib nqus yuav hla ncaj qha thiab lwm yam. Muaj qhov luv luv ntawm lub voj voog sib nqus tshwm sim hauv lub hom phiaj, ua rau kev tso tawm nyuaj. Txhawm rau tsim kom muaj lub teb sib nqus, ntau txoj kev tshawb fawb tau ua tiav, piv txwv li, ua rau lub teb sib nqus hauv lub hom phiaj puv, tawm ntau qhov sib txawv ntawm lub hom phiaj los txhawb nws kom tsim cov hlau nplaum ntau dua kom nce qhov kub ntawm lub hom phiaj, lossis txo qhov permeability ntawm lub hom phiaj.
– Tsab xov xwm no yog luam tawm los ntawmlub tshuab nqus tsev txheej tshuab chaw tsim khoomGuangdong Zhenhua
Lub sijhawm tshaj tawm: Cuaj hlis-08-2023