Kwinqaku elingaphambili, sithethe ngeempawu zokugquma nge-sputtering, kwaye eli nqaku liza kuqhubeka lichaza iimpawu zokugquma nge-sputtering.
(4) Ubushushu be-substrate buphantsi. Izinga lokutshiza liphezulu kuba uxinzelelo lwee-elektroni luphezulu ngaphakathi kummandla we-magnetic field we-cathode target, oko kukuthi, kwindawo encinci yendawo kwindawo yokulahla i-target, nangaphandle kommandla we-magnetic action, ingakumbi kufutshane nomphezulu we-substrate kude ne-magnetic field, uxinzelelo lwee-elektroni luphantsi kakhulu ngenxa yokwahlukana, kwaye lunokuba ngaphantsi kunolo lwe-binary sputtering (kuba uxinzelelo lwegesi olusebenzayo lwala mabini luhluhlulwe ngobukhulu). Ke ngoko, phantsi kweemeko zokutshiza, uxinzelelo lwee-elektroni kumphezulu we-bombarded substrate luphantsi kakhulu kunolo lwe-secondary sputtering eqhelekileyo, kwaye ukunyuka okugqithisileyo kobushushu be-substrate kuyathintelwa ngenxa yokuncipha kwenani lee-elektroni kwi-incident substrate. Ukongeza, kwindlela yokutshiza, i-anode yesixhobo sokutshiza inokubekwa kwindawo ejikeleze i-cathode, kwaye isakhelo se-substrate sinokuba kwindawo enokuxhonywa, ukuze ii-electron zikwazi ukuhamba nge-anode ngaphandle kokudlula kwisakhelo se-substrate esisezantsi, ngaloo ndlela zinciphisa ii-electron ezinamandla aphezulu eziqhushumba i-substrate eqhotsiweyo, zinciphisa ukwanda kobushushu be-substrate obubangelwa kukwenzeka kwee-electron, kwaye zinciphise kakhulu ubushushu obubangelwa kukuqhushumba kwe-electron yesibini ye-substrate.
(5) Ukugrumba okungalinganiyo kwethagethi. Kwithagethi yesiqhelo yokugrumba, kusetyenziswa intsimi yemagnethi engalinganiyo, ngoko ke iplasma iya kuvelisa isiphumo sokudibana kwendawo, esiya kwenza izinga lokugrumba lokugrumba kwindawo yendawo ekujoliswe kuyo libe likhulu kakhulu, kwaye isiphumo siya kuba kukugrumba okungalinganiyo okubalulekileyo kwithagethi. Izinga lokusetyenziswa kwezinto ekujoliswe kuzo ngokubanzi limalunga nama-30%. Ukuze kuphuculwe izinga lokusetyenziswa kwezinto ekujoliswe kuzo, amanyathelo ahlukeneyo okuphucula anokuthathwa, njengokuphucula imo kunye nokusasazwa kwentsimi yemagnethi ekujoliswe kuyo, ukuze imagnethi ihambe ngaphakathi kwe-cathode ekujoliswe kuyo.
(6) Ukutshiza okujoliswe kuko kwezinto zemagnethi kunzima. Ukuba ithagethi yokutshiza yenziwe ngezinto ezinomtshini ophezulu, imigca yemagnethi iya kudlula ngokuthe ngqo njalo njalo. Isekethe emfutshane yemagnethi yenzeka ngaphakathi kwethagethi, nto leyo eyenza kube nzima ukukhupha. Ukuze kuveliswe intsimi yemagnethi yendawo, kwenziwe izifundo ezahlukeneyo, umzekelo, ukugcwala intsimi yemagnethi ngaphakathi kwethagethi, okushiya izikhewu ezininzi kwithagethi ukuyikhuthaza ukuvelisa umtshini wokuvuza ongakumbi ukuze kwandiswe ubushushu bethagethi, okanye ukunciphisa umtshini wokutyibilika kwethagethi.
– Eli nqaku likhutshwe nguumenzi womatshini wokugquma nge-vacuumGuangdong Zhenhua
Ixesha lokuthumela: Sep-08-2023