Siffofin shafi na magnetron sputtering babi na 2

A cikin labarin da ya gabata, mun yi magana game da halayen shafa man shafawa, kuma wannan labarin zai ci gaba da bayyana halayen shafa man shafawa.

(4) Zafin substrate ɗin yayi ƙasa. Yawan sputtering na sputtering yana da yawa saboda yawan electrons yana da yawa a cikin yankin filin maganadisu na maƙasudin cathode, wato, a cikin ƙaramin yanki na gida akan titin fitarwa na manufa, da kuma a wajen yankin aikin maganadisu, musamman kusa da saman substrate da nisa da filin maganadisu, yawan electrons ɗin ya yi ƙasa sosai saboda bambancin ra'ayi, kuma yana iya ma ƙasa da na sputtering binary (saboda matsin iskar gas mai aiki na biyu ya bambanta da girma). Saboda haka, a ƙarƙashin yanayin sputtering, yawan electrons ɗin da ke saman substrate ɗin da aka jefa ya yi ƙasa da na sputtering na sakandare na yau da kullun, kuma ana guje wa ƙaruwar zafin substrate saboda raguwar adadin electrons a cikin substrate ɗin da ya faru. Bugu da ƙari, a cikin hanyar sputtering, ana iya samun anode na na'urar sputtering a kusa da cathode, kuma firam ɗin substrate ɗin kuma yana iya kasancewa kuma a kan wani ƙarfin da aka dakatar, don haka electrons za su iya gudana ta cikin anode ba tare da wucewa ta cikin firam ɗin substrate da aka gina ba, ta haka ne za a rage electrons masu ƙarfi waɗanda ke jefa bam a kan substrate ɗin da aka yi wa fenti, rage ƙaruwar zafin substrate da ke haifar da faruwar electron, da kuma rage zafin da fashewar electron ta haifar sosai.

(5) Ƙirƙirar abin da aka nufa ba ta daidaita ba. A cikin maƙasudin sputtering na gargajiya, ana amfani da filin maganadisu mara kama da juna, don haka plasma zai samar da tasirin haɗuwa na gida, wanda zai sa ƙimar fesawa na wurin da aka nufa ya yi girma sosai, kuma sakamakon zai zama babban fesawa mara daidaituwa akan abin da aka nufa. Yawan amfani da kayan da aka nufa gabaɗaya kusan kashi 30%. Domin inganta yawan amfani da kayan da aka nufa, ana iya ɗaukar matakai daban-daban na ingantawa, kamar inganta siffa da rarraba filin maganadisu da aka nufa, don haka maganadisu ta motsa a cikin cathode da aka nufa.

(6) Tura mai amfani da na'urar maganadisu yana da wahala. Idan an yi amfani da na'urar da ke da ƙarfin maganadisu mai yawa, layukan filin maganadisu za su wuce kai tsaye da sauransu. Da'irar maganadisu tana faruwa a cikin abin da ake nufi, wanda hakan ke sa fitar da ruwa ya zama da wahala. Domin samar da filin maganadisu na sarari, an gudanar da bincike daban-daban, misali, cika filin maganadisu a cikin abin da ake nufi, wanda hakan ke barin gibi da yawa a kan abin da ake nufi don haɓaka shi don samar da ƙarin maganadisu na zubewa don ƙara zafin abin da ake nufi, ko rage ƙarfin maganadisu na abin da ake nufi.

– An fitar da wannan labarin ne daga hannuninjin shafa injin injinGuangdong Zhenhua