Astaamaha cutubyada dahaarka magnetron sputtering ee 2aad

Maqaalkii hore, waxaan ka hadalnay astaamaha dahaarka dahaarka, maqaalkani wuxuu sii wadi doonaa inuu sharaxo astaamaha dahaarka dahaarka dahaarka.

(4) Heerkulka substrate-ka waa hooseeyaa. Heerka faafinta ee faafinta ayaa sarreeya sababtoo ah fiirsashada elektaroonada ayaa sare u kacda gobolka goobta birlabta ee bartilmaameedka cathode-ka, taas oo ah, aag yar oo maxalli ah oo ku yaal wadada loo maro daadinta bartilmaameedka, iyo meel ka baxsan gobolka ficilka birlabta, gaar ahaan meel u dhow dusha sare ee substrate-ka oo ka fog goobta birlabta, fiirsashada elektarooniga aad ayay uga hooseysaa kala duwanaanshaha, waxayna xitaa ka hooseyn kartaa kan faafinta laba-geesoodka ah (sababtoo ah cadaadiska gaaska ee shaqeynaya ee labada waa kala duwan yahay). Sidaa darteed, xaaladaha faafinta, fiirsashada elektarooniga ee dusha sare ee substrate-ka la duqeeyay aad ayuu uga hooseeyaa kan faafinta labaad ee caadiga ah, kororka xad dhaafka ah ee heerkulka substrate-kana waa laga fogaadaa sababtoo ah hoos u dhaca tirada elektaroonada ee substrate-ka dhacdada. Intaa waxaa dheer, habka sputtering-ka, anode-ka qalabka sputtering-ka waxaa laga heli karaa agagaarka cathode-ka, qaab-dhismeedka substrate-kuna wuxuu sidoo kale noqon karaa oo ku jiri karaa awood la hakiyey, si elektaroonada ay uga qulqulaan anode-ka iyagoon dhex marin qaab-dhismeedka substrate-ka dhulka ku yaal, taasoo yaraynaysa elektaroonada tamarta sare leh ee duqeeya substrate-ka la dahaadhay, taasoo yaraynaysa kororka kulaylka substrate-ka ee uu keeno dhacdooyinka electron-ka, iyo si weyn u yaraynta kulaylka uu keeno bamgareynta electron-ka labaad ee substrate-ka.

(5) Qalin aan sinnayn oo bartilmaameedka ah. Bartilmaameedka buufinta dhaqameed, waxaa la isticmaalaa goob birlabeed oo aan sinnayn, sidaa darteed balaasmaha wuxuu soo saari doonaa saameyn isku-dhafan oo maxalli ah, taasoo ka dhigi doonta heerka xoqidda buufinta booska maxalliga ah ee bartilmaameedka mid aad u weyn, natiijaduna waxay noqon doontaa qalin aan sinnayn oo muhiim ah oo ku saabsan bartilmaameedka. Heerka isticmaalka walxaha bartilmaameedka ah guud ahaan waa qiyaastii 30%. Si loo hagaajiyo heerka isticmaalka walxaha bartilmaameedka ah, tallaabooyin horumarineed oo kala duwan ayaa la qaadi karaa, sida hagaajinta qaabka iyo qaybinta goobta birlabka bartilmaameedka ah, si birlabku ugu dhaqaaqo gudaha cathode-ka bartilmaameedka ah.

(6) Tuurista walxaha birlabta ah waa adag tahay. Haddii bartilmaameedka tuufinta uu ka samaysan yahay walax leh awood birlab sare leh, khadadka goobta birlabta ayaa si toos ah u gudbi doona iwm. Wareeg gaaban oo birlab ah ayaa ka dhaca gudaha bartilmaameedka, taasoo ka dhigaysa dheecaan adag. Si loo soo saaro goob birlab ah oo meel bannaan ah, daraasado kala duwan ayaa la sameeyay, tusaale ahaan, buuxinta goobta birlabta ee ku jirta bartilmaameedka, taasoo ka tagaysa meelo badan oo bartilmaameedka ah si loo dhiirrigeliyo si loo abuuro birlab badan oo daadanaya si loo kordhiyo heerkulka bartilmaameedka, ama loo yareeyo u-adeegsiga birlabta ee bartilmaameedka.

– Maqaalkan waxaa soo saaray प्रभयोंsoo saaraha mashiinka dahaadhka faakuumkaGuangdong Zhenhua