1. Ukuthambekela kwe-workpiece kuphansi
Ngenxa yokwengezwa kwedivayisi ukwandisa izinga le-ionization, ubuningi bamanje okukhishwayo buyakhuphuka, futhi i-voltage ye-bias yehliswa ibe ngu-0.5 ~ 1kV.
Ukubuyela emuva okubangelwa ukuqhuma ngokweqile kwama-ion anamandla aphezulu kanye nomphumela womonakalo ebusweni bezinto zokusebenza kuyancipha.
2. Ukwanda kobuningi be-plasma
Kuye kwengezwa izinyathelo ezahlukahlukene zokukhuthaza i-ionization yokushayisana, futhi izinga le-ionization yensimbi likhuphuke lisuka ku-3% laya ngaphezu kuka-15%. Ubuningi bama-ion esilevini nama-athomu angathathi hlangothi anamandla aphezulu, ama-ion e-nitrogen, ama-athomu asebenzayo anamandla aphezulu kanye namaqembu asebenzayo ekamelweni lokumboza liyakhuphuka, okuhambisana nokusabela ekwakheni ama-compounds. Ubuchwepheshe obuhlukahlukene obuthuthukisiwe bokumboza ama-ion okumboza ukukhanya bukwazile ukuthola izendlalelo zefilimu eqinile ye-TN ngokumboza kokusabela ekumisweni okuphezulu kwe-plasma, kodwa ngenxa yokuthi zingezohlobo lokukhishwa kokukhanya, ubuningi bamanje bokukhishwa abuphakeme ngokwanele (kusese yizinga le-mA/cm2), futhi ubuningi be-plasma bubonke abuphakeme ngokwanele, futhi inqubo yokumboza kokuhlanganiswa kokusabela inzima.
3. Ububanzi bokumboza bomthombo wokuhwamuka kwamaphuzu buncane
Ubuchwepheshe obuhlukahlukene bokumboza ama-ion obuthuthukisiwe busebenzisa imithombo yokuhwamuka kwe-electron beam, kanye ne-gantu njengomthombo wokuhwamuka kwephuzu, okukhawulelwe esikhawulweni esithile ngaphezu kwe-gantu ukuze kufakwe ukusabela, ngakho-ke umkhiqizo uphansi, inqubo inzima, futhi kunzima ukuyenza ibe yizimboni.
4. Ukusebenza kwesibhamu sikagesi ngomfutho ophezulu
I-voltage yesibhamu se-electron ingu-6~30kV, kanti i-voltage ye-bias workpiece ingu-0.5~3kV, ephathelene nokusebenza kwe-voltage ephezulu futhi inezingozi ezithile zokuphepha.
——Lesi sihloko sikhishwe yiGuangdong Zhenhua Technology,umenzi wemishini yokumboza ebonakalayo.
Isikhathi sokuthunyelwe: Meyi-12-2023