1. Kusankhana kwa ntchito ndi kochepa
Chifukwa cha kuwonjezera chipangizo kuti chiwonjezere kuchuluka kwa ionization, kuchuluka kwa mphamvu yotulutsa kumawonjezeka, ndipo mphamvu ya bias imachepetsedwa kufika pa 0.5 ~ 1kV.
Kubwerera m'mbuyo komwe kumachitika chifukwa cha kuphulika kwakukulu kwa ma ayoni amphamvu komanso kuwonongeka komwe kumachitika pamwamba pa workpiece kumachepa.
2. Kuchuluka kwa madzi a m'magazi
Njira zosiyanasiyana zolimbikitsira ionization yogundana zawonjezedwa, ndipo chiŵerengero cha ionization chachitsulo chakwera kuchoka pa 3% kufika pa 15%. Kuchulukana kwa ma ayoni a chibwano ndi ma atomu opanda mphamvu zambiri, ma ayoni a nayitrogeni, ma atomu ogwira ntchito amphamvu kwambiri ndi magulu ogwira ntchito m'chipinda chophikira kukuwonjezeka, zomwe zimathandiza kuti pakhale ma compounds. Maukadaulo osiyanasiyana owonjezera a ion ophikira kuwala omwe ali pamwambapa atha kupeza zigawo zolimba za TN mwa kuyika reaction pa plasma densities yapamwamba, koma chifukwa ndi a mtundu wa glow discharge, kuchuluka kwa discharge current sikukwanira (komabe mulingo wa mA/cm2), ndipo kuchuluka kwa plasma konse sikukwanira, ndipo njira yoyika reaction deposition compound coating ndi yovuta.
3. Kuchuluka kwa utoto wa gwero la nthunzi ndi kochepa
Ukadaulo wosiyanasiyana wowonjezera wa ma ion umagwiritsa ntchito magwero a evaporation a electron beam, ndi gantu ngati gwero la evaporation, lomwe limangokhala ndi nthawi inayake pamwamba pa gantu kuti liwonetsetse reaction, kotero kuti zokolola zimakhala zochepa, njira yake ndi yovuta, ndipo zimakhala zovuta kuigwiritsa ntchito monga mafakitale.
4. Kugwiritsa ntchito mfuti zamagetsi pogwiritsa ntchito mphamvu zambiri
Voltage ya mfuti ya ma elekitironi ndi 6 ~ 30kV, ndipo voteji ya bias ya workpiece ndi 0.5 ~ 3kV, yomwe ndi ya ntchito yamagetsi amphamvu ndipo ili ndi zoopsa zina zachitetezo.
——Nkhani iyi yatulutsidwa ndi Guangdong Zhenhua Technology, awopanga makina opaka utoto.
Nthawi yotumizira: Meyi-12-2023