1. Ukukhetha okuphantsi kwe-workpiece
Ngenxa yokongezwa kwesixhobo sokunyusa izinga le-ionization, uxinano lwangoku lokukhupha luyanda, kwaye i-bias voltage iyancipha iye kwi-0.5 ~ 1kV.
Ukubuyela umva okubangelwa kukuqhushumba kakhulu kwee-ions ezinamandla aphezulu kunye nefuthe lomonakalo kumphezulu wezinto zokusebenza kuyancitshiswa.
2. Ukwanda koxinano lweplasma
Kuye kongezwa amanyathelo ahlukeneyo okukhuthaza i-collision ionization, kwaye izinga le-metal ionization linyuke ukusuka kwi-3% ukuya ngaphezulu kwe-15%. Uxinano lwee-ion zesilevu kunye nee-atoms ezingathathi hlangothi ezinamandla aphezulu, ii-ion ze-nitrogen, ii-atoms ezisebenzayo ezinamandla aphezulu kunye namaqela asebenzayo kwigumbi lokugquma lunyusiwe, nto leyo enceda ekuphenduleni ukwenza iikhompawundi. Ezi teknoloji zingentla ziphuculweyo zokugquma ii-ion zokugquma ziye zakwazi ukufumana iileya ze-TN hard film ngokubeka i-reaction kwi-plasma densities ephezulu, kodwa ngenxa yokuba zezohlobo lokukhupha i-glow, uxinano lwangoku lokukhupha aluphezulu ngokwaneleyo (lisesenqanaba le-mA/cm2), kwaye uxinano lwe-plasma iyonke aluphezulu ngokwaneleyo, kwaye inkqubo yokubeka i-reaction deposition compound coating inzima.
3. Uluhlu lokugquma lomthombo wokufuma kwenqaku luncinci
Iiteknoloji ezahlukeneyo zokugquma ii-ion eziphuculweyo zisebenzisa imithombo yokufuma ye-electron beam, kunye ne-gantu njengomthombo wokufuma wenqaku, olinganiselwe kwisithuba esithile ngaphezulu kwe-gantu ukuze kufakwe i-reaction, ngoko ke imveliso iphantsi, inkqubo inzima, kwaye kunzima ukuyenza ibe yimizi-mveliso.
4. Ukusebenza ngompu we-elektroniki osebenzisa uxinzelelo oluphezulu
I-voltage ye-electron gun yi-6 ~ 30kV, kwaye i-voltage ye-bias ye-workpiece yi-0.5 ~ 3kV, enxulumene nokusebenza kwe-high-voltage kwaye ineengozi ezithile zokhuseleko.
——Eli nqaku likhutshwe yiGuangdong Zhenhua Technology,umenzi weematshini zokugquma ezibonakalayo.
Ixesha lokuthumela: Meyi-12-2023