1. Kusarura kwebasa kwakaderera
Nekuda kwekuwedzera kwemudziyo wekuwedzera ionization rate, huwandu hwe discharge current hunowedzerwa, uye bias voltage inoderedzwa kusvika 0.5 ~ 1kV.
Kudzokera shure kunokonzerwa nekuputirwa kwakanyanya kwemaayoni ane simba rakawanda uye kukuvara kunokonzerwa nepamusoro pechinhu chebasa kunodzikira.
2. Kuwedzera kwehuwandu hweplasma
Matanho akasiyana-siyana ekusimudzira ionization yekukonana akawedzerwa, uye mwero weionization yesimbi wakawedzera kubva pa3% kusvika kupfuura 15%. Kuwanda kwemaion echirebvu nemaatomu asina simba rakawanda, maion enitrogen, maatomu anoshanda ane simba rakawanda uye mapoka anoshanda mukamuri rekuvhara kwakawedzerwa, izvo zvinoita kuti reaction iite macompounds. Matekinoroji akasiyana-siyana ekuwedzera glow discharge ion coating akakwanisa kuwana TN hard film layers ne reaction deposition pa plasma densities yakakwira, asi nekuti ndeerudzi rwe glow discharge, discharge current density haina kukwana (ichiri mA/cm2 level), uye huwandu hwese hweplasma density hauna kukwana, uye maitiro e reaction deposition compound coating akaoma.
3. Kufukidza kwenzvimbo inobuda mvura kudiki
Matekinoroji akasiyana-siyana ekuwedzera maion coating anoshandisa ma electron beam evaporation sources, uye gantu senzvimbo yekubuda kwemvura, iyo inogumira kune imwe nguva pamusoro pegantu yekuisa reaction, saka kubereka kwacho kwakaderera, maitiro acho akaoma, uye zvakaoma kuita maindasitiri.
4. Kushandiswa kwepfuti yemagetsi ine simba guru
Voltage yepfuti ye electron i6~30kV, uye voltage ye workpiece bias i0.5~3kV, iyo inoshanda pakushanda kwe high-voltage uye ine njodzi dzakati wandei dzekuchengetedza.
——Chinyorwa ichi chakaburitswa neGuangdong Zhenhua Technology, amugadziri wemichina yekuputira yemaziso.
Nguva yekutumira: Chivabvu-12-2023