1. Qhov kev ua haujlwm tsis ncaj ncees yog qis
Vim yog qhov ntxiv ntawm lub cuab yeej los ua kom tus nqi ionization nce ntxiv, qhov ceev tam sim no ntawm kev tso tawm tau nce ntxiv, thiab qhov hluav taws xob bias raug txo kom txog 0.5 ~ 1kV.
Qhov backsputtering uas tshwm sim los ntawm kev foob pob ntau dhau ntawm cov ions muaj zog siab thiab qhov cuam tshuam puas tsuaj rau ntawm qhov chaw ua haujlwm raug txo qis.
2. Ua kom cov ntshav ntom ntom ntxiv
Ntau yam kev ntsuas los txhawb kev sib tsoo ionization tau ntxiv, thiab tus nqi hlau ionization tau nce ntxiv los ntawm 3% mus rau ntau dua 15%. Qhov ceev ntawm cov chin ions thiab cov atoms nruab nrab muaj zog siab, nitrogen ions, cov atoms nquag muaj zog siab thiab cov pab pawg nquag hauv chav txheej tau nce ntxiv, uas yog qhov zoo rau cov tshuaj tiv thaiv los tsim cov tshuaj sib xyaw. Cov txheej txheem txheej txheem ci ntsa iab ion txheej saum toj no tau txais TN cov txheej zaj duab xis nyuaj los ntawm kev tso cov tshuaj tiv thaiv ntawm cov plasma densities siab dua, tab sis vim tias lawv koom nrog hom tso tawm ci, qhov ceev tam sim no tso tawm tsis siab txaus (tseem mA / cm2 theem), thiab qhov ceev plasma tag nrho tsis siab txaus, thiab cov txheej txheem ntawm cov tshuaj tiv thaiv deposition compound txheej nyuaj.
3. Qhov ntau ntawm cov txheej txheem ntawm cov ntsiab lus evaporation yog me me
Ntau yam thev naus laus zis txhim kho ion siv cov khoom siv hluav taws xob beam evaporation, thiab gantu ua qhov chaw evaporation taw tes, uas txwv rau qee lub sijhawm saum toj no gantu rau kev tso tawm cov tshuaj tiv thaiv, yog li qhov tsim tau tsawg, cov txheej txheem nyuaj, thiab nws nyuaj rau kev lag luam.
4. Kev ua haujlwm siab ntawm rab phom hluav taws xob
Lub zog hluav taws xob ntawm rab phom hluav taws xob yog 6 ~ 30kV, thiab lub zog hluav taws xob ntawm qhov chaw ua haujlwm yog 0.5 ~ 3kV, uas yog rau kev ua haujlwm siab thiab muaj qee qhov kev phom sij rau kev nyab xeeb.
—— Tsab xov xwm no tau tshaj tawm los ntawm Guangdong Zhenhua Technology, ib qhoChaw tsim khoom ntawm cov tshuab txheej kho qhov muag.
Lub sijhawm tshaj tawm: Tsib Hlis-12-2023