1. Ubwiyongere bw'ibikoresho byo gukora ni buke
Bitewe no kongeramo igikoresho cyo kongera igipimo cya ionization, ubucucike bw'umuyoboro w'amashanyarazi buriyongera, kandi voltage ya bias igabanuka ikagera kuri 0.5 ~ 1kV.
Gusubira inyuma guterwa no guterwa cyane kwa iyoni zikoresha ingufu nyinshi n'ingaruka zangiritse ku buso bw'ibikoresho biragabanuka.
2. Ubwinshi bw'amaraso mu maraso (plasma) bwiyongera
Ingamba zitandukanye zo guteza imbere ionization yo kugongana zongeweho, kandi igipimo cya ionization y'icyuma cyariyongereye kuva kuri 3% kigera hejuru ya 15%. Ubucucike bwa iyoni z'urukiramende n'atomu zidafite ingufu nyinshi, iyoni za azote, atomu zikoresha ingufu nyinshi n'amatsinda akora mu cyumba cyo gusigamo burariyongereye, ibyo bikaba byorohereza uburyo bwo gukora ibintu. Ikoranabuhanga ryavuzwe haruguru ryongereye ikoranabuhanga ryo gusigamo ion rikoresha urumuri ryashoboye kubona imiterere ikomeye ya TN binyuze mu gushyiramo reaction ku bucucike bwinshi bwa plasma, ariko kubera ko ari mu bwoko bw'urukiramende rukoresha urumuri, ubucucike bw'amashanyarazi bwo gusigamo ntabwo buri hejuru bihagije (buracyari ku rwego rwa mA/cm2), kandi ubucucike rusange bwa plasma ntabwo buri hejuru bihagije, kandi inzira yo gushyiramo reaction ivanze iragoye.
3. Ingano y'aho ituruka mu gushonga kw'ingingo ni nto
Ikoranabuhanga ritandukanye ryo gusiga irangi rya iyoni rikoresha amasoko y’ibyuka bya elegitoroniki, na gantu nk'isoko y’ibyuka, rigarukira ku gihe runaka hejuru ya gantu kugira ngo haboneke reaction, bityo umusaruro uba muke, inzira iragoye, kandi biragoye kubyaza umusaruro inganda.
4. Gukoresha imbunda y'ikoranabuhanga ikoresheje umuvuduko mwinshi
Voltage y'imbunda ya electron ni 6 ~ 30kV, naho voltage ya bias ya workpiece ni 0.5 ~ 3kV, ikoreshwa mu mikorere ifite voltage nyinshi kandi ifite ingaruka zimwe na zimwe ku mutekano.
——Iyi nkuru yasohotse na Guangdong Zhenhua Technology,uruganda rukora imashini zisiga irangi ry'urumuri.
Igihe cyo kohereza: Gicurasi-12-2023