Izisetshenziswa zamukela ukuma komnyango wangaphambili omile kanye nesakhiwo seqoqo. Ingafakwa ngemithombo yokuhwamuka kwezinsimbi nezinto ezihlukahlukene eziphilayo, futhi ingahwamulisa amawafa e-silicon emininingwane ehlukahlukene. Ifakwe uhlelo lokuqondanisa ngokunemba, ukunamathela kuzinzile futhi ukunamathela kunokuphindaphinda okuhle.
Izinto zokumboza ze-GX600 zingakwazi ukuhwamuka ngokunembile, ngokulinganayo nangokulawulekayo izinto eziphilayo ezikhipha ukukhanya noma izinto zensimbi ku-substrate. Inezinzuzo zokubunjwa kwefilimu elula, ukuhlanzeka okuphezulu nokuqina okuphezulu. Uhlelo lokuqapha ngesikhathi sangempela ukujiya kwefilimu okuzenzakalelayo lungaqinisekisa ukuphindaphinda nokuzinza kwenqubo. Ifakwe umsebenzi wokuzincibilikisa ukuze unciphise ukuncika kumakhono omqhubi.
Imishini ingasetshenziswa ku-Cu, Al, Co, Cr, Au, Ag, Ni, Ti nezinye izinto zensimbi, futhi ingafakwa ngefilimu yensimbi, ifilimu ye-dielectric layer, ifilimu ye-IMD, njll. isetshenziswa ikakhulukazi embonini ye-semiconductor, njengamadivayisi kagesi, i-semiconductor yangemuva yokupakisha i-substrate coating, njll.
| GX600 | GX900 |
| φ600*800(mm) | φ900*H1050(mm) |