Ibikoresho bikora imiterere y’umuryango w’imbere uhagaze n’imiterere y’amatsinda. Bishobora gushyirwaho amasoko y’amazi aturuka ku byuma n’ibikoresho bitandukanye by’umwimerere, kandi bishobora gushonga uduce twa silikoni tw’imiterere itandukanye. Bifite uburyo bwo guhuza neza, igitambaro kirahamye kandi igitambaro gishobora gusubiramo neza.
Ibikoresho byo gusiga GX600 bishobora gushonga neza, neza kandi mu buryo bungana kandi bugenzurwa ibikoresho bisohora urumuri cyangwa ibyuma biva mu butaka. Bifite ibyiza byo gukora firime byoroshye, bifite ubuziranenge bwinshi kandi bito cyane. Sisitemu yo kugenzura ubugari bwa firime mu buryo bwikora ishobora kwemeza ko inzira isubiramo kandi ihamye. Bifite ubushobozi bwo kwishongesha kugira ngo bigabanye ubushobozi bw'umukoresha.
Ibikoresho bishobora gushyirwa kuri Cu, Al, Co, Cr, Au, Ag, Ni, Ti n'ibindi bikoresho by'icyuma, kandi bishobora gusigwa na firime y'icyuma, firime y'urwego rwa dielectric, firime ya IMD, nibindi. Bikoreshwa cyane cyane mu nganda za semiconductor, nk'ibikoresho by'amashanyarazi, irangi rya substrate rya semiconductor inyuma, nibindi.
| GX600 | GX900 |
| φ600*800(mm) | φ900*H1050(mm) |