1. The workpiece bias yakaderera
Nekuda kwekuwedzera kwechishandiso chekuwedzera ionization rate, iyo yekuburitsa ikozvino density inowedzera, uye bias voltage inoderedzwa kusvika 0.5 ~ 1kV.
Kudzokera kumashure kunokonzerwa nekubhomba kwakanyanya kwemaion ane simba repamusoro uye kukuvara kwenzvimbo yebasa kunoderedzwa.
2. Kuwedzera kweplasma density
Matanho akasiyana-siyana ekusimudzira kudhumhana ionization akawedzerwa, uye chiyero chesimbi ionization chakawedzera kubva pa3% kusvika kunopfuura 15%. Kuwanda kwemaatomu echirebvu uye maatomu ane simba guru-ane simba, maatomu enitrogen, maatomu ane simba guru uye mapoka anoshanda muimba yekuputira anowedzerwa, izvo zvinoita kuti pave nekuita kuumba makomboni. Iwo ari pamusoro akasiyana akakwenenzverwa ekuvhenekesa ekuburitsa ion coating tekinoroji akakwanisa kuwana TN yakaoma firimu akaturikidzana nekuita deposition pakakwirira plasma densities, asi nekuti ivo ndeverudzi rwekupenya kwekubuda, density iripo haina kukwirira zvakakwana (ichiri mA/cm2 nhanho), uye iyo yakazara plasma density haina kukwirira zvakakwana, uye kuumbwa kwekuita kwakaoma.
3. The coating range of point evaporation source idiki
Yakasiyana-siyana yakagadziridzwa ion coating tekinoroji inoshandisa maelectron beam evaporation sources, uye gantu sepoindi evaporation sosi, iyo inoganhurirwa kune imwe nguva iri pamusoro pe gantu yekuita deposition deposition, saka kugadzirwa kwakaderera, maitiro akaoma, uye zvakaoma kusimudzira.
4. Electronic gun high-pressure operation
Erekitironi pfuti voltage ndeye 6 ~ 30kV, uye workpiece bias voltage i 0.5 ~ 3kV, iyo ndeyekushanda kwe-high-voltage uye ine dzimwe njodzi dzekuchengetedza.
——Chinyorwa ichi chakaburitswa naGuangdong Zhenhua Technology, amugadziri we optical coating machines.
Nguva yekutumira: May-12-2023