GX600

Ibikoresho bifata inzugi zimbere imbere nuburyo bwa cluster imiterere. Irashobora kuba ifite ibikoresho byo guhumeka byuma nibikoresho bitandukanye kama, kandi irashobora guhumeka wafer ya silicon yibintu bitandukanye. Hamwe na sisitemu yo guhuza neza, igifuniko kirahagaze kandi igifuniko gifite isubiramo ryiza.
Ibikoresho byo gutwikira GX600 birashobora neza, biringaniye kandi bigashobora guhumeka ibikoresho bitanga urumuri cyangwa ibikoresho byuma kuri substrate. Ifite ibyiza byo gukora firime yoroshye, ubuziranenge bwinshi hamwe no guhuzagurika cyane. Sisitemu yuzuye-yikora ya firime yuzuye-igihe cyo kugenzura sisitemu irashobora kwemeza ko isubirwamo kandi igahinduka. Ifite ibikoresho byo gushonga kugirango igabanye gushingira kubuhanga bukoreshwa.
Ibikoresho birashobora gukoreshwa kuri Cu, Al, Co, Cr, Au, Ag, Ni, Ti nibindi bikoresho byuma, kandi birashobora gushirwa hamwe na firime yicyuma, dielectric layer firime, firime ya IMD, nibindi bikoreshwa cyane cyane mubikorwa bya semiconductor, nkibikoresho byamashanyarazi, ibikoresho bya semiconductor inyuma bipfunyika substrate, nibindi.