Zipangizozi zimatengera kapangidwe ka khomo lakutsogolo komanso kamangidwe ka masango. Ikhoza kukhala ndi magwero a evaporation a zitsulo ndi zinthu zosiyanasiyana zachilengedwe, ndipo imatha kusungunula zowotcha za silicon zamitundu yosiyanasiyana. Okonzeka ndi dongosolo mwatsatanetsatane mayikidwe, ❖ kuyanika ndi khola ndipo ❖ kuyanika ali ndi repeatability wabwino.
Zipangizo zokutira za GX600 zimatha kusungunula zinthu zotulutsa kuwala kapena zitsulo molunjika, mofanana komanso mokhazikika. Zili ndi ubwino wa mapangidwe osavuta a filimu, chiyero chapamwamba komanso kusakanikirana kwakukulu. Makina owonetsetsa athunthu amtundu wanthawi zonse amatha kutsimikizira kubwereza komanso kukhazikika kwa njirayi. Ili ndi ntchito yosungunula yokha kuti muchepetse kudalira luso la wogwiritsa ntchito.
zida angagwiritsidwe ntchito Cu, Al, Co, Cr, Au, Ag, Ni, Ti ndi zipangizo zitsulo, ndipo akhoza TACHIMATA ndi zitsulo filimu, dielectric wosanjikiza filimu, IMD filimu, etc. izo zimagwiritsa ntchito makampani semiconductor, monga zipangizo mphamvu, semiconductor kumbuyo ma CD gawo lapansi ❖ kuyanika, etc.
| GX600 | GX900 |
| φ600*800(mm) | φ900*H1050(mm) |