1. The workpiece son zuciya ne low
Saboda ƙarin na'urar don ƙara yawan adadin ionization, yawan fitarwa na yanzu yana ƙaruwa, kuma an rage ƙarfin wutar lantarki zuwa 0.5 ~ 1kV.
A backsputtering lalacewa ta hanyar wuce kima bombardment na high-makamashi ions da kuma lalacewa sakamako a kan workpiece surface an rage.
2. Ƙara yawan ƙwayar plasma
An kara matakan daban-daban don haɓaka ionization na karo, kuma adadin ionization na ƙarfe ya karu daga 3% zuwa fiye da 15%. The yawa na Chin ions da high-makamashi tsaka tsaki atoms, nitrogen ions, high-makamashi aiki atoms da kuma aiki kungiyoyin a shafi jam'iyya ya karu, wanda shi ne conducive zuwa dauki ga samar da mahadi. Daban-daban na sama daban-daban inganta haske fitarwa ion shafi fasahar sun sami damar samun TN wuya film yadudduka ta dauki jita-jita a mafi girma plasma yawa, amma saboda sun kasance a cikin haske fitarwa nau'i, da fitarwa halin yanzu yawa bai isa ba (har yanzu mA / cm2 matakin), da kuma overall plasma yawa ba shi da isa, da kuma aiwatar da dauki ajiya fili shafi yana da wahala.
3. Matsakaicin shafi na tushen ƙawancen ma'ana yana da ƙananan
Daban-daban ingantattun fasahohin rufe ion suna amfani da tushen ƙawancen wutar lantarki, da gantu a matsayin tushen ƙafewa, wanda ke iyakance ga wani ɗan lokaci sama da gantu don ƙaddamar da amsawa, don haka yawan aiki ya yi ƙasa, tsarin yana da wahala, kuma yana da wahala a haɓaka masana'antu.
4. Wutar lantarki mai ƙarfi aiki
Wutar lantarki ta gun lantarki shine 6 ~ 30kV, kuma ƙarfin ƙarfin aiki na bias shine 0.5 ~ 3kV, wanda ke cikin aiki mai ƙarfin lantarki kuma yana da wasu haɗarin aminci.
——An fitar da wannan labarin ta hanyar fasahar Guangdong Zhenhua, amanufacturer na Tantancewar shafi inji.
Lokacin aikawa: Mayu-12-2023