Imishini yokumboza ehlanganisiwe ye-magnetron sputtering kanye ne-cathodic multi-arc ion coating ingasebenza ngokwehlukana nangesikhathi esifanayo; ingafakwa futhi ilungiswe ifilimu yensimbi emsulwa, ifilimu yensimbi ehlanganisiwe noma ifilimu ehlanganisiwe; ingaba ungqimba olulodwa lwefilimu kanye nefilimu ehlanganisiwe enezingqimba eziningi.
Izinzuzo zayo zilandelayo:
Akugcini nje ngokuhlanganisa izinzuzo zezingubo zokugqoka ezihlukahlukene ze-ion futhi kucatshangelwa ukulungiswa nokufakwa kwefilimu encane yemikhakha ehlukahlukene yokusetshenziswa, kodwa futhi kuvumela ukufakwa nokulungiswa kwamafilimu e-monolithic anezingqimba eziningi noma amafilimu ahlanganisiwe anezingqimba eziningi ekamelweni elifanayo lokumboza nge-vacuum ngesikhathi esisodwa.
Ukusetshenziswa kwezingqimba zefilimu ezifakiwe kusetshenziswa kabanzi, ubuchwepheshe bayo butholakala ngezindlela ezahlukene, ezijwayelekile kanje:
(1) Inhlanganisela yobuchwepheshe bokubhoboza i-magnetron okungeyona eyokulingana kanye ne-cathodic ion plating.
Idivayisi yayo iboniswa kanje. Iyimishini yokumboza ehlanganisiwe ye-columnar magnetron target kanye ne-planar cathodic arc ion coating, efanelekile kokubili ifilimu yokumboza ithuluzi kanye nefilimu yokuhlobisa. Ekumbozeni ithuluzi, i-cathodic arc ion coating isetshenziswa kuqala ekumbozeni kwesendlalelo sesisekelo, bese kuthi i-column magnetron target isetshenziswe ekubekeni i-nitride kanye nezinye izendlalelo zefilimu ukuze kutholakale ifilimu engaphezulu yethuluzi lokucubungula elinokunemba okuphezulu.
Ukuze kuhlanganiswe izinto zokuhlobisa, amafilimu okuhlobisa e-TiN kanye ne-ZrN angafakwa kuqala nge-cathodic arc coating, bese efakwa ngensimbi kusetshenziswa ama-magnetron target, futhi umphumela we-doping muhle kakhulu.
(2) Inhlanganisela ye-magnetron yendiza ezimbili kanye nobuchwepheshe bokumboza i-arc ion yekholomu. Idivayisi iboniswa kanje. Isetshenziswa ubuchwepheshe obuthuthukisiwe be-twin target, lapho ama-targets amabili ahlangene axhunywe kugesi we-medium frequency, ayigcini nje ngokunqoba ubuthi obuqondiwe bokubhoboza kwe-DC, umlilo kanye nezinye izinkinga; futhi ingabeka ifilimu yekhwalithi ye-Al203, i-SiO2 oxide, ukuze ukumelana kwe-oxidation kwezingxenye ezimboziwe kukhuphuke futhi kuthuthuke. I-Columnar multi-arc target efakwe maphakathi negumbi le-vacuum, izinto eziqondiwe zingasetshenziswa i-Ti ne-Zr, hhayi nje ukugcina izinzuzo zesilinganiso esiphakeme sokuhlukaniswa kwe-multi-arc, izinga lokufakwa, kodwa futhi inganciphisa ngempumelelo "amaconsi" enkambisweni yokufakwa kwe-target yendiza encane ye-multi-arc, ingabeka futhi ilungiselele i-porosity ephansi yamafilimu ensimbi, amafilimu ahlanganisiwe. Uma i-Al ne-Si zisetshenziswa njengezinto eziqondiwe zama-targets e-twin planar magnetron afakwe emngceleni, amafilimu ensimbi e-Al203 noma e-Si0 angabekwa futhi alungiswe. Ngaphezu kwalokho, izindiza ezincane eziningi zomthombo wokuhwamuka kwe-multi-arc zingafakwa emngceleni, futhi izinto eziqondiwe zingaba yi-Cr noma i-Ni, futhi amafilimu ensimbi namafilimu ahlanganisiwe anezingqimba eziningi angafakwa futhi alungiswe. Ngakho-ke, lobu buchwepheshe bokumboza obuhlanganisiwe buwubuchwepheshe bokumboza obuhlanganisiwe obunezinhlelo eziningi.
Isikhathi sokuthunyelwe: Novemba-08-2022