Ibikoresho byo gusiga irangi bya magnetron sputtering na cathodic multi-arc ion coating bishobora gukora ukwabyo no icyarimwe; bishobora gushyirwa no gutegurwa firime y'icyuma isanzwe, firime y'icyuma cyangwa firime y'icyitegererezo; bishobora kuba urwego rumwe rwa firime na firime y'icyitegererezo ifite urwego rwinshi.
Ibyiza byayo ni ibi bikurikira:
Ntabwo ihuza gusa ibyiza byo gusiga irangi ry’iyoni kandi ita ku gutegura no gushyiramo firime nto mu nzego zitandukanye zo kuyikoresha, ahubwo inatuma ishyirwamo no gutegura firime za monolithic zifite ibara ry’icyiciro kinini cyangwa firime za multi-layer composite mu cyumba kimwe cyo gusigamo irangi icyarimwe.
Uburyo bwo gukoresha ibice bya filime bishyirwamo bukoreshwa cyane, ikoranabuhanga ryabyo riri mu buryo butandukanye, ubusanzwe ni ubu bukurikira:
(1) Urusobe rw'ikoranabuhanga rya magnetron idakoresha uburinganire n'ikoranabuhanga rya cathodic ion plating.
Igikoresho cyacyo kigaragara gutya. Ni ibikoresho byo gutwikira byuzuyemo icyuma cya magnetron target na planar cathodic arc ion coating, bikwiranye na filime y’ibikoresho byo gutwikira ndetse n’icyuma cyo gushushanya filime. Ku bikoresho byo gutwikira, icyuma cya cathodic arc ion coating kibanza gukoreshwa ku gipfundikizo cy’ibanze, hanyuma icyuma cya magnetron column target kigakoreshwa mu gushyira nitride n’izindi filime mu rwego rwo kubona filime y’ubuso bw’igikoresho cyo gutunganya neza.
Ku bijyanye no gusiga irangi ry'imitako, filime z'imitako za TiN na ZrN zishobora gushyirwaho hakoreshejwe cathodic arc coating mbere, hanyuma zigashyirwamo icyuma hakoreshejwe magnetron targets, kandi ingaruka za doping ni nziza cyane.
(2) Urusobe rw'ibikoresho bya magnetron y'indege ebyiri n'uburyo bwo gusiga arc ion. Iki gikoresho kigaragazwa gutya. Gikoreshwa mu ikoranabuhanga rigezweho rya twin target, iyo ibitego bibiri bifatanye n'amashanyarazi akoreshwa ku buryo buciriritse, ntikirwanya gusa uburozi bw'ibice bya DC, umuriro n'ibindi bibazo; kandi gishobora gushyiramo Al203, SiO2 oxide quality film, ku buryo ubudahangarwa bw'ibice byasizwe bwiyongereye kandi burushaho kwiyongera. Igitego cya Columnar multi-arc gishyizwe hagati mu cyumba cy'imyanda, ibikoresho byagenewe bishobora gukoreshwa Ti na Zr, atari ukugira ngo bigumane ibyiza byo kwitandukanya kwa multi-arc, igipimo cyo gushyiramo, ahubwo bishobora no kugabanya neza "ibitonyanga" mu gihe cyo gushyiramo icyuma gito cya multi-arc, gishobora gushyiramo no gutegura porosity nke ya filime z'icyuma, filime z'imyanda. Niba Al na Si bikoreshwa nk'ibikoresho byagenewe ibitego bya twin planar magnetron bishyizwe ku nkengero z'aho hantu, filime za Al203 cyangwa Si0 metal-ceramic zishobora gushyirwamo no gutegurwa. Byongeye kandi, uturere twinshi duto tw’isoko ry’amazi menshi dushobora gushyirwa ku nkengero z’aho amazi aturuka, kandi ibikoresho byayo bishobora kuba Cr cyangwa Ni, kandi ibyuma na filime zivanze zishobora gushyirwa no gutegurwa. Kubwibyo, ubu buryo bwo gusiga irangi ry’amazi ni ikoranabuhanga ryo gusiga irangi ry’amazi rifite akamaro kenshi.
Igihe cyo kohereza: Ugushyingo-08-2022