Izixhobo zokugquma ezidityanisiweyo ze-magnetron sputtering kunye ne-cathodic multi-arc ion coating zinokusebenza ngokwahlukeneyo nangaxeshanye; zinokufakwa kwaye zilungiswe ifilimu yesinyithi ecocekileyo, ifilimu yesinyithi edityanisiweyo okanye ifilimu edityanisiweyo; inokuba ngumaleko omnye wefilimu kunye nefilimu edityanisiweyo enezingqi ezininzi.
Iingenelo zayo zezi zilandelayo:
Ayihlanganisi nje kuphela iingenelo zeengubo ezahlukeneyo ze-ion kwaye ithathela ingqalelo ukulungiswa kunye nokubekwa kwefilimu encinci kwiindawo ezahlukeneyo zokusetyenziswa, kodwa ikwavumela ukufakwa kunye nokulungiswa kweefilimu ze-monolithic ezinamalayelo amaninzi okanye iifilimu ezidityanisiweyo ezinamalayelo amaninzi kwigumbi elifanayo lokugquma i-vacuum ngaxeshanye.
Ukusetyenziswa kwee-layers zefilimu ezigciniweyo zisetyenziswa kakhulu, kwaye ubuchwepheshe bayo bukwiindlela ezahlukeneyo, ezi ziqhelekileyo zezi zilandelayo:
(1) Ikhompawundi ye-non-equilibrium magnetron sputtering kunye netekhnoloji ye-cathodic ion plating.
Isixhobo sayo siboniswe ngolu hlobo lulandelayo. Sisixhobo sokugquma esidityanisiweyo se-columnar magnetron target kunye ne-planar cathodic arc ion coating, esifanelekileyo kwifilimu yokugquma yesixhobo kunye nefilimu yokuhombisa. Kwi-tool coating, i-cathodic arc ion coating isetyenziswa kuqala kwi-base layer coating, kwaye emva koko i-column magnetron target isetyenziselwa ukubeka i-nitride kunye nezinye ii-film layers ukuze kufunyanwe ifilimu yomphezulu wesixhobo sokucutshungulwa ngokuchanekileyo.
Kwizinto zokuhombisa, iifilimu zokuhombisa zeTiN kunye neZrN zinokufakwa kuqala nge-cathodic arc coating, emva koko zifakwe isinyithi kusetyenziswa iithagethi zemagnetron, kwaye isiphumo se-doping silungile kakhulu.
(2) I-compound ye-twin plane magnetron kunye neendlela zokugquma i-column cathode arc ion. Esi sixhobo siboniswe ngolu hlobo lulandelayo. Sisetyenziswa iteknoloji ephambili ye-twin target, xa iithagethi ezimbini zecala-necala ezidityaniswe nombane ophakathi, ayipheleli nje ekunqobeni ityhefu ekujoliswe kuyo yokutshiza kwe-DC, umlilo kunye nezinye iingxaki; kwaye inokufaka ifilimu yomgangatho we-Al203, i-SiO2 oxide, ukuze ukumelana ne-oxidation kweendawo ezigqunyiweyo kwande kwaye kuphuculwe. Ithagethi ye-columnar multi-arc efakwe embindini wegumbi le-vacuum, izinto ezijoliswe kuzo zingasetyenziswa i-Ti kunye ne-Zr, kungekuphela nje ukugcina iingenelo zesantya esiphezulu sokuhlukana kwe-multi-arc, isantya sokubeka, kodwa ikwanokunciphisa ngempumelelo "amaconsi" kwinkqubo yokubekelwa kwethagethi ye-multi-arc encinci, inokufaka kwaye ilungiselele i-porosity ephantsi yeefilimu zesinyithi, iifilimu ezihlanganisiweyo. Ukuba i-Al kunye ne-Si zisetyenziswa njengezixhobo ezijoliswe kuzo zeethagethi ze-twin planar magnetron ezifakwe kumda, iifilimu ze-Al203 okanye ze-Si0 zesinyithi-ceramic zinokufakwa kwaye zilungiswe. Ukongeza, iiplane ezincinci ezininzi zomthombo wokufuma we-multi-arc zinokufakwa emngceleni, kwaye izinto ezijoliswe kuzo zingaba yi-Cr okanye i-Ni, kwaye iifilimu zesinyithi kunye neefilimu ezidityanisiweyo ezinamalayelo amaninzi zinokufakwa kwaye zilungiswe. Ke ngoko, le teknoloji yokugquma edityanisiweyo yiteknoloji yokugquma edityanisiweyo enezicelo ezininzi.
Ixesha lokuthumela: Novemba-08-2022