Hiki i nā lako uhi composite o ka magnetron sputtering a me ka cathodic multi-arc ion coating ke hana kaʻawale a i ka manawa like; hiki ke waiho a hoʻomākaukau ʻia kahi kiʻiʻoniʻoni metala maʻemaʻe, kahi kiʻiʻoniʻoni hui metala a i ʻole kahi kiʻiʻoniʻoni composite; hiki ke lilo i hoʻokahi papa o ka kiʻiʻoniʻoni a me kahi kiʻiʻoniʻoni composite multi-layer.
ʻO kona mau pono penei:
ʻAʻole ia e hoʻohui wale i nā pono o nā uhi ion like ʻole a noʻonoʻo i ka hoʻomākaukau ʻana a me ka waiho ʻana o ka ʻili lahilahi no nā ʻano noi like ʻole, akā hiki nō hoʻi ke waiho ʻana a me ka hoʻomākaukau ʻana o nā kiʻiʻoniʻoni monolithic multi-layer a i ʻole nā kiʻiʻoniʻoni composite multi-layer i loko o ka lumi uhi vacuum like i ka manawa hoʻokahi.
Hoʻohana nui ʻia nā noi o nā papa kiʻiʻoniʻoni i waiho ʻia, aia kāna mau ʻenehana i nā ʻano like ʻole, nā mea maʻamau penei:
(1) ʻO ka hui pū ʻana o ka magnetron sputtering non-equilibrium a me ka ʻenehana plating ion cathodic.
Ua hōʻike ʻia kāna hāmeʻa e like me kēia. He lako uhi hui ia o ka pahuhopu magnetron kolamu a me ka uhi ion arc cathodic planar, kahi kūpono no ka uhi ʻili hui uhi mea hana a me ka uhi ʻili hoʻonaninani. No ka uhi ʻana i ka mea hana, hoʻohana mua ʻia ka uhi ion arc cathodic no ka uhi ʻana i ka papa kumu, a laila hoʻohana ʻia ka pahuhopu magnetron kolamu no ka waiho ʻana o ka nitride a me nā papa ʻili ʻē aʻe e loaʻa ai kahi ʻili ʻili mea hana hana kiʻekiʻe.
No ka uhi ʻana i ka hoʻonaninani, hiki ke waiho ʻia nā kiʻiʻoniʻoni hoʻonaninani TiN a me ZrN e ka uhi ʻana i ka arc cathodic mua, a laila hoʻohui ʻia me ka metala me ka hoʻohana ʻana i nā pahuhopu magnetron, a maikaʻi loa ka hopena doping.
(2) ʻO ka hui ʻana o ka magnetron mokulele māhoe a me nā ʻenehana uhi ion cathode arc kolamu. Hōʻike ʻia ka hāmeʻa e like me kēia. Hoʻohana ʻia ka ʻenehana pahuhopu māhoe holomua, i ka wā e pili ana nā pahuhopu māhoe ʻelua ʻaoʻao i ka lako mana alapine waena, ʻaʻole ia e lanakila wale i ka make ʻana o ka pahuhopu o ka DC sputtering, ke ahi a me nā drawbacks ʻē aʻe; a hiki ke waiho i ka Al203, SiO2 oxide quality film, i hoʻonui ʻia a hoʻomaikaʻi ʻia ke kūpaʻa oxidation o nā ʻāpana i uhi ʻia. ʻO ka pahuhopu multi-arc columnar i hoʻokomo ʻia ma ke kikowaena o ke keʻena vacuum, hiki ke hoʻohana ʻia ka mea pahuhopu Ti a me Zr, ʻaʻole wale no ka mālama ʻana i nā pono o ka nui o ka dissociation multi-arc kiʻekiʻe, ka nui o ka waiho ʻana, akā hiki nō hoʻi ke hoʻemi pono i nā "droplets" i ke kaʻina hana o ka waiho ʻana o ka pahuhopu multi-arc mokulele liʻiliʻi, hiki ke waiho a hoʻomākaukau i kahi porosity haʻahaʻa o nā kiʻiʻoniʻoni metala, nā kiʻiʻoniʻoni hui. Inā hoʻohana ʻia ʻo Al a me Si ma ke ʻano he mau mea pahuhopu no nā pahuhopu magnetron planar māhoe i hoʻokomo ʻia ma ka periphery, hiki ke waiho a hoʻomākaukau ʻia nā kiʻiʻoniʻoni metala-ceramic Al203 a i ʻole Si0. Eia kekahi, hiki ke hoʻokomo ʻia nā mokulele liʻiliʻi he nui o ke kumu hoʻoheheʻe multi-arc ma ka periphery, a hiki i kāna mea i manaʻo ʻia ke Cr a i ʻole Ni, a hiki ke waiho ʻia a hoʻomākaukau ʻia nā kiʻiʻoniʻoni metala a me nā kiʻiʻoniʻoni composite multilayer. No laila, ʻo kēia ʻenehana uhi composite he ʻenehana uhi composite me nā noi he nui.
Ka manawa hoʻouna: Nov-08-2022