Ngwa mkpuchi mejupụtara nke magnetron sputtering na mkpuchi ion cathodic multi-arc nwere ike ịrụ ọrụ iche na n'otu oge; enwere ike itinye ma kwadebe ihe nkiri ígwè dị ọcha, ihe nkiri mejupụtara ígwè ma ọ bụ ihe nkiri mejupụtara; nwere ike ịbụ otu oyi akwa nke ihe nkiri na ihe nkiri mejupụtara ọtụtụ oyi akwa.
Uru ya dị ka ndị a:
Ọ bụghị naanị na ọ na-ejikọta uru nke mkpuchi ion dị iche iche ma na-eburu n'uche nkwadebe na itinye ihe nkiri dị gịrịgịrị maka ọtụtụ ebe a na-eji ya, kamakwa ọ na-enye ohere itinye na ịkwadebe ihe nkiri monolithic dị iche iche ma ọ bụ ihe nkiri mejupụtara ọtụtụ oyi akwa n'otu ụlọ mkpuchi vacuum n'otu oge.
A na-eji usoro ihe nkiri etinye ihe n'ime ya eme ihe nke ọma, teknụzụ ya dịkwa n'ọtụtụ ụdị, dịka ndị a na-ahụkarị:
(1) Ngwakọta nke teknụzụ magnetron na-enweghị nha nhata na mkpuchi ion cathodic.
E gosiri ngwaọrụ ya dịka ndị a. Ọ bụ ihe mkpuchi ngwakọta nke ihe mgbaru ọsọ magnetron columnar na ihe mkpuchi ion planar cathodic arc, nke dabara adaba maka ihe mkpuchi ngwakọta ngwaọrụ na ihe mkpuchi ihe nkiri mma. Maka mkpuchi ngwaọrụ, a na-ebu ụzọ jiri mkpuchi ion cathodic arc maka mkpuchi oyi akwa isi, wee jiri ihe mgbaru ọsọ magnetron kọlụm maka itinye nitride na oyi akwa ihe nkiri ndị ọzọ iji nweta ihe nkiri elu ngwa nhazi dị elu.
Maka mkpuchi mma, a pụrụ itinye ihe nkiri ịchọ mma TiN na ZrN site na mkpuchi arc nke kathodic, wee jiri ígwè mee ihe site na iji magnetron targets, mmetụta doping ahụ dịkwa mma nke ukwuu.
(2) Usoro mkpuchi magnetron nke abụọ na kọlụm kathode arc ion. E gosiri ngwaọrụ a dịka ndị a. A na-eji teknụzụ ebumnuche abụọ dị elu eme ihe, mgbe ebumnuche abụọ dị n'akụkụ na nke ọzọ jikọtara na ike ọkụ eletrik etiti, ọ bụghị naanị na ọ na-emeri nsị ebumnuche nke sputtering DC, ọkụ na ihe ndọghachi azụ ndị ọzọ; ọ nwekwara ike itinye ihe nkiri oxide Al203, SiO2 dị mma, ka iguzogide oxidation nke akụkụ ndị a kpuchiri ekpuchi amụbaala ma ka mma. Enwere ike iji ihe mgbaru ọsọ columnar multi-arc arụnyere n'etiti ụlọ vacuum, ihe mgbaru ọsọ nwere ike iji Ti na Zr, ọ bụghị naanị iji nọgide na-enwe uru nke oke ọsọ nkewa multi-arc dị elu, ọnụego nkwụnye, kamakwa ọ nwere ike ibelata "mmiri mmiri" nke ọma n'usoro obere oghere multi-arc lekwasịrị anya, nwere ike itinye ma kwadebe obere porosity nke ihe nkiri ígwè, ihe nkiri compound. Ọ bụrụ na ejiri Al na Si dị ka ihe mgbaru ọsọ maka ebumnuche magnetron abụọ planar arụnyere na mpụta, enwere ike itinye ma kwadebe ihe nkiri metal-seramiki Al203 ma ọ bụ Si0. Tinyere nke ahụ, enwere ike itinye ọtụtụ obere ụgbọelu nke isi iyi evaporation multi-arc n'akụkụ ya, ihe e ji ebu ya nwere ike ịbụ Cr ma ọ bụ Ni, a pụkwara itinye ma kwadebe ihe nkiri ígwè na ihe nkiri mejupụtara ọtụtụ oyi akwa. Ya mere, teknụzụ mkpuchi mejupụtara a bụ teknụzụ mkpuchi mejupụtara nke nwere ọtụtụ ngwa.
Oge ozi: Nọvemba-08-2022