Cov khoom siv txheej txheem sib xyaw ntawm magnetron sputtering thiab cathodic multi-arc ion txheej tuaj yeem ua haujlwm sib cais thiab tib lub sijhawm; tuaj yeem tso thiab npaj cov hlau ntshiab zaj duab xis, hlau sib xyaw zaj duab xis lossis zaj duab xis sib xyaw; tuaj yeem yog ib txheej ntawm zaj duab xis thiab ntau txheej zaj duab xis sib xyaw.
Nws cov txiaj ntsig raws li nram no:
Nws tsis yog tsuas yog muab cov txiaj ntsig ntawm ntau yam ion coatings thiab coj mus rau hauv tus account qhov kev npaj thiab kev tso tawm ntawm cov zaj duab xis nyias rau ntau qhov chaw ntawm daim ntawv thov, tab sis kuj tso cai rau kev tso tawm thiab kev npaj ntawm ntau txheej monolithic zaj duab xis lossis ntau txheej composite zaj duab xis hauv tib lub tshuab nqus tsev txheej ib zaug.
Cov ntawv thov ntawm cov txheej txheem tso zaj duab xis tau siv dav dav nws cov thev naus laus zis yog nyob rau hauv ntau hom, cov qauv ib txwm muaj raws li nram no:
(1) Lub compound ntawm non-equilibrium magnetron sputtering thiab cathodic ion plating technology.
Nws cov khoom siv tau qhia raws li nram no. Nws yog cov khoom siv txheej sib xyaw ua ke ntawm lub hom phiaj magnetron thiab planar cathodic arc ion txheej, uas yog qhov tsim nyog rau ob qho tib si txheej txheem cuab yeej thiab txheej txheem kho kom zoo nkauj. Rau txheej txheem cuab yeej, cathodic arc ion txheej yog siv ua ntej rau txheej txheej hauv paus, thiab tom qab ntawd lub hom phiaj magnetron kem yog siv rau kev tso cov nitride thiab lwm cov txheej zaj duab xis kom tau txais cov zaj duab xis saum npoo ntawm cov cuab yeej ua haujlwm siab.
Rau cov txheej txheem kho kom zoo nkauj, TiN thiab ZrN cov yeeb yaj kiab kho kom zoo nkauj tuaj yeem tso los ntawm cathodic arc txheej ua ntej, thiab tom qab ntawd doped nrog hlau siv magnetron lub hom phiaj, thiab cov nyhuv doping zoo heev.
(2) Cov txheej txheem sib xyaw ua ke ntawm cov txheej txheem txheej txheem magnetron thiab cov txheej txheem txheej txheem cathode arc ion. Lub cuab yeej tau qhia raws li hauv qab no. Nws siv cov thev naus laus zis siab heev, thaum ob lub hom phiaj sib txuas ua ke txuas nrog lub zog nruab nrab, nws tsis tsuas yog kov yeej qhov kev lom ntawm DC sputtering, hluav taws thiab lwm yam teeb meem; thiab tuaj yeem tso Al203, SiO2 oxide zoo zaj duab xis, yog li qhov kev tiv thaiv oxidation ntawm cov khoom coated tau nce thiab zoo dua. Lub hom phiaj ntau-arc columnar ntsia rau hauv nruab nrab ntawm lub tshuab nqus tsev, cov khoom siv lub hom phiaj tuaj yeem siv Ti thiab Zr, tsis yog tsuas yog tswj cov txiaj ntsig ntawm kev sib cais ntau-arc siab, tus nqi tso tawm, tab sis kuj tuaj yeem txo cov "droplets" hauv cov txheej txheem ntawm lub hom phiaj me me ntau-arc, tuaj yeem tso tawm thiab npaj cov yeeb yaj kiab hlau, cov yeeb yaj kiab sib xyaw. Yog tias Al thiab Si raug siv ua cov khoom siv lub hom phiaj rau lub hom phiaj magnetron ob lub hom phiaj ntsia rau ntawm qhov chaw, Al203 lossis Si0 zaj duab xis hlau-ceramic tuaj yeem tso tawm thiab npaj. Tsis tas li ntawd xwb, ntau lub dav hlau me me ntawm ntau lub arc evaporation qhov chaw tuaj yeem ntsia tau rau ntawm qhov chaw ib puag ncig, thiab nws cov khoom siv tuaj yeem yog Cr lossis Ni, thiab cov yeeb yaj kiab hlau thiab cov yeeb yaj kiab sib xyaw ntau txheej tuaj yeem tso thiab npaj tau. Yog li ntawd, cov txheej txheem txheej txheem sib xyaw no yog cov txheej txheem txheej txheem sib xyaw nrog ntau daim ntawv thov.
Lub sijhawm tshaj tawm: Kaum Ib Hlis-08-2022