Zipangizo zophikira zophatikizana za magnetron sputtering ndi cathodic multi-arc ion coating zingagwire ntchito padera komanso nthawi imodzi; zitha kuyikidwa ndikukonzedwa filimu yachitsulo yoyera, filimu yachitsulo yophatikizika kapena filimu yophatikizika; zitha kukhala filimu imodzi ndi filimu yophatikizika yophatikizika yophatikizika.
Ubwino wake ndi monga:
Sikuti zimangophatikiza ubwino wa zophimba zosiyanasiyana za ayoni ndipo zimaganizira kukonzekera ndi kuyika filimu yopyapyala m'magawo osiyanasiyana ogwiritsira ntchito, komanso zimathandiza kuyika ndi kukonza mafilimu a monolithic ambiri kapena mafilimu amitundu yosiyanasiyana mu chipinda chimodzi chophikira vacuum nthawi imodzi.
Kugwiritsa ntchito zigawo za filimu zomwe zasungidwa kumagwiritsidwa ntchito kwambiri, ndipo ukadaulo wake ulipo m'njira zosiyanasiyana, zomwe zimachitika kawirikawiri ndi izi:
(1) Kuphatikiza kwa magnetron sputtering yosagwirizana ndi ukadaulo wa cathodic ion plating.
Chipangizo chake chikuwonetsedwa motere. Ndi chipangizo chophikira chophatikizika cha columnar magnetron target ndi planar cathodic arc ion coating, chomwe chimayenera kugwiritsidwa ntchito pa filimu yophikira zida komanso filimu yokongoletsera. Pa chophimba cha zida, chophimba cha cathodic arc ion chimagwiritsidwa ntchito choyamba pa chophimba cha base layer, kenako cholinga cha column magnetron chimagwiritsidwa ntchito poika nitride ndi zigawo zina za filimu kuti mupeze filimu yolondola kwambiri ya chida chopangira pamwamba.
Pakukongoletsa, mafilimu okongoletsera a TiN ndi ZrN amatha kuyikidwa ndi cathodic arc coating poyamba, kenako nkupaka chitsulo pogwiritsa ntchito magnetron targets, ndipo zotsatira za doping ndi zabwino kwambiri.
(2) Kuphatikiza kwa maginito awiri a ndege ndi njira zophikira arc ion. Chipangizochi chikuwonetsedwa motere. Chimagwiritsidwa ntchito ndi ukadaulo wapamwamba wa twin target, pomwe maginito awiri a mbali ndi mbali olumikizidwa ndi magetsi apakatikati, sikuti amangogonjetsa poizoni wa DC sputtering, moto ndi zovuta zina; ndipo amatha kuyika filimu ya Al203, SiO2 oxide quality, kotero kuti kukana kwa okosijeni kwa zigawo zophimbidwa kwawonjezeka ndikukula. Columnar multi-arc target yoyikidwa pakati pa chipinda chotsukira, zinthu zomwe zimagwiritsidwa ntchito zitha kugwiritsidwa ntchito Ti ndi Zr, osati kungosunga ubwino wa kuchuluka kwa kugawanika kwa multi-arc, kuchuluka kwa kuyika, komanso kumatha kuchepetsa bwino "madontho" poika maginito ang'onoang'ono a multi-arc target, kumatha kuyika ndikukonzekera porosity yochepa ya mafilimu achitsulo, mafilimu ophatikizika. Ngati Al ndi Si agwiritsidwa ntchito ngati zida zomwe zimagwiritsidwa ntchito pa maginito awiri a planar magnetron omwe amayikidwa pamphepete, mafilimu achitsulo a Al203 kapena Si0 amatha kuyikidwa ndikukonzedwa. Kuphatikiza apo, mapulaneti ang'onoang'ono angapo a gwero la evaporation la multi-arc likhoza kuyikidwa m'mphepete mwa nyanja, ndipo cholinga chake chingakhale Cr kapena Ni, ndipo mafilimu achitsulo ndi mafilimu ophatikizika a multilayer amatha kusungidwa ndikukonzedwa. Chifukwa chake, ukadaulo uwu wophatikizika ndi ukadaulo wophatikizika wokhala ndi ntchito zambiri.
Nthawi yotumizira: Novembala-08-2022