Kayan aikin rufewa na magnetron sputtering da cathodic multi-arc ion coating na iya aiki daban-daban kuma a lokaci guda; ana iya ajiyewa da shirya fim ɗin ƙarfe mai tsarki, fim ɗin haɗa ƙarfe ko fim ɗin haɗa ƙarfe; zai iya zama Layer ɗaya na fim da fim ɗin haɗa mai yawa.
Amfaninsa kamar haka:
Ba wai kawai yana haɗa fa'idodin nau'ikan rufin ion daban-daban ba kuma yana la'akari da shiri da adana fim ɗin siriri don fannoni daban-daban na aikace-aikace, har ma yana ba da damar adanawa da shirya fina-finan monolithic masu launuka da yawa ko fina-finan haɗaka masu launuka da yawa a cikin ɗakin rufewa ɗaya a lokaci guda.
Ana amfani da fasahar da aka yi amfani da ita wajen yin fim ɗin da aka ajiye a wurare daban-daban, waɗanda aka fi amfani da su a yau:
(1) Haɗin fasahar magnetron sputtering mara daidaito da kuma fasahar plating ion cathodic.
An nuna na'urarsa kamar haka. Kayan aiki ne na shafa mai hade da aka yi da columnar magnetron target da planar cathodic arc ion columnar, wanda ya dace da duka fim ɗin hadawa na kayan aiki da kuma fenti na fim na ado. Don shafa kayan aiki, ana amfani da murfin cathodic arc ion da farko don shafa mai tushe, sannan ana amfani da maƙallin magnetron column don adana nitride da sauran yadudduka na fim don samun fim ɗin saman kayan aiki mai inganci.
Don shafa kayan ado, ana iya ajiye fina-finan ado na TiN da ZrN ta hanyar shafa kathodic arc da farko, sannan a shafa su da ƙarfe ta amfani da maƙasudin magnetron, kuma tasirin doping ɗin yana da kyau sosai.
(2) Haɗaɗɗen fasahar rufin magnetron mai hawa biyu da kuma ginshiƙin cathode arc ion. An nuna na'urar kamar haka. Ana amfani da ita a matsayin fasahar manufa ta biyu, lokacin da tagwayen maƙasudai biyu masu gefe biyu da aka haɗa da wutar lantarki ta matsakaicin mita, ba wai kawai tana shawo kan gubar da aka yi niyya ta hanyar sputtering na DC ba, wuta da sauran lahani; kuma tana iya ajiye fim ɗin ingancin oxide na Al203, SiO2, don haka juriyar oxidation na sassan da aka shafa sun ƙaru kuma sun inganta. An sanya maƙasudin ginshiƙin ... Bugu da ƙari, ana iya shigar da ƙananan jiragen sama da yawa na tushen ƙafewar arc a gefen wurin, kuma kayan da aka nufa na iya zama Cr ko Ni, kuma ana iya ajiye fina-finan ƙarfe da fina-finan haɗakarwa masu yawa da yawa kuma ana iya shirya su. Saboda haka, wannan fasahar shafa mai haɗakarwa fasaha ce ta shafa mai haɗakarwa tare da aikace-aikace da yawa.
Lokacin Saƙo: Nuwamba-08-2022