Ka taea te mahi motuhake me te mahi tahi i ngā taputapu paninga hiato o te magnetron sputtering me te cathodic multi-arc ion; ka taea te whakatakoto me te whakarite i te kiriata whakarewa parakore, te kiriata matū whakarewa, te kiriata hiato rānei; ka taea te hanga i te paparanga kotahi o te kiriata me te kiriata hiato maha-apa.
Ko ōna painga penei:
Ehara i te mea ka whakakotahi noa i ngā painga o ngā paninga katote maha, ā, ka whakaarohia hoki te whakarite me te whakatakotoranga o te kiriata angiangi mō ngā momo mara tono, engari ka taea hoki te whakatakotoranga me te whakarite o ngā kiriata monolitiki maha-apa, ngā kiriata hiato maha-apa rānei i roto i te rūma paninga korehau kotahi i te wā kotahi.
He whānuitia te whakamahinga o ngā paparanga kiriata kua whakatakotoria, ā, he maha ngā momo hangarau e whakamahia ana, ko ngā mea noa e whai ake nei:
(1) Te matū o te hangarau whakakikorua irahiko kore-taurite me te hangarau whakakikorua katote.
Ko tōna taputapu e whakaaturia ana penei. He taputapu paninga matū tēnei o te paninga ira-ā-ira-pou me te paninga ira-ā-ira-pōro katote papatahi, e tika ana mō te paninga taputapu kiriata matū me te paninga kiriata whakapaipai. Mō te paninga taputapu, ka whakamahia tuatahitia te paninga ira-ā-ira-pōro katote mō te paninga paparanga turanga, kātahi ka whakamahia te ira-ā-ira-pou mō te whakatakotoranga o te nitride me ētahi atu paparanga kiriata hei whiwhi i te kiriata mata taputapu tukatuka tino tika.
Mō te paninga whakapaipai, ka taea te whakatakoto i ngā kiriata whakapaipai TiN me ZrN mā te paninga pewa katote i te tuatahi, kātahi ka pania ki te konganuku mā te whakamahi i ngā ūnga magnetron, ā, he tino pai te pānga paninga.
(2) Ko te matū o te magnetron papa rua me te cathode pewa poutū. Ko te whakaaturanga o te taputapu penei. E whakamahia ana te hangarau whāinga mahanga matatau, ina honoa ngā whāinga mahanga e rua ki te pūtake hiko auau reo, ehara i te mea ka wikitoria i te paihana whāinga o te DC sputtering, te ahi me ētahi atu ngoikoretanga; ā, ka taea te whakatakoto i te kiriata kounga waikura Al203, SiO2, kia piki ake ai te ātete waikura o ngā wāhanga kua pania, kia pai ake ai hoki. Mēnā ka tāutahia te whāinga maha-pewa poutū ki waenganui o te rūma korehau, ka taea te whakamahi i te rauemi whāinga Ti me Zr, ehara i te mea hei pupuri i ngā painga o te tere wehewehe maha-pewa teitei, te tere whakatakoto, engari ka taea hoki te whakaiti i ngā "pata" i roto i te tukanga whakatakoto whāinga maha-pewa papa iti, ka taea te whakatakoto me te whakarite i te porosity iti o ngā kiriata whakarewa, ngā kiriata pūhui. Mēnā ka whakamahia te Al me te Si hei rauemi whāinga mō ngā whāinga magnetron papa rua kua tāutahia ki te taha, ka taea te whakatakoto me te whakarite i ngā kiriata whakarewa-uku Al203, Si0 rānei. Hei tāpiritanga, ka taea te tāuta i ngā papa iti maha o te pūtake mimiti maha-āwhata ki te taha, ā, ko tōna rauemi whāinga ko te Cr, ko te Ni rānei, ā, ka taea te whakatakoto me te whakarite i ngā kiriata whakarewa me ngā kiriata hiato maha-paparanga. Nō reira, he hangarau paninga hiato tēnei hangarau paninga hiato me ngā tono maha.
Wā tuku: Whiringa-ā-rangi-08-2022