Iisembozo se-vacuumInqubo yomshini ihlukaniswe kanje: i-vacuum evaporation coating, i-vacuum sputtering coating kanye ne-vacuum ion coating.
1, Umshini ukuhwamuka enamathelayo
Ngaphansi kwesimo se-vacuum, yenza izinto ziphele, njengensimbi, i-alloy yensimbi, njll. bese uzibeka phezu kwe-substrate, indlela yokumboza ukuhwamuka ivame ukusebenzisa ukushisa kokumelana, bese kufakwa i-electron beam yezinto zokumboza, ziphele zibe yigesi, bese zifakwa phezu kwe-substrate, ngokomlando, ukufakwa kwe-vacuum vapor ubuchwepheshe bangaphambilini obusetshenziswa endleleni ye-PVD.
2, ukumboza nge-sputtering
Igesi ikhishwa ngaphansi kwezimo ze-vacuum ezigcwele i-(Ar)Ngalesi sikhathi ama-athomu e-argon (Ar) afaka i-ion kuma-ion e-nitrogen (Ar), Ama-ion asheshiswa ngamandla ensimu kagesi, bese ehlasela ithagethi ye-cathode eyenziwe ngezinto zokumboza, ithagethi izokhishwa bese ifakwa ebusweni be-substrate Ama-ion esigamekweni sokumboza, ngokuvamile atholakala ngokukhishwa kokukhanya, aphakathi kuka-10-2pa kuya ku-10Pa, Ngakho-ke izinhlayiya ezifakwe ama-sputter kulula ukushayisana nama-molecule egesi ekamelweni lokumboza lapho endiza eya endaweni yokumboza, okwenza isiqondiso sokunyakaza singahleliwe futhi ifilimu efakiwe ibe lula ukuba ifane.
3, i-ion enamathelayo
Ngaphansi kwezimo ze-vacuum, Ngaphansi kwesimo se-vacuum, Kusetshenziswe indlela ethile ye-plasma ionization ukuze kufakwe i-ion ngokwengxenye ama-athomu ezinto zokumboza abe ama-ion. Ngesikhathi esifanayo kukhiqizwa ama-athomu amaningi angathathi hlangothi anamandla aphezulu, athambekele kabi ku-substrate. Ngale ndlela, ama-ion abekwa ebusweni be-substrate ngaphansi kwe-deep negative bias ukuze kwakhiwe ifilimu encane.
Isikhathi sokuthunyelwe: Mashi-23-2023