Thechophimba cha vacuumNjira ya makina imagawidwa m'magulu awiri: chophimba cha vacuum evaporation, chophimba cha vacuum sputtering ndi chophimba cha vacuum ion.
1, Vacuum evaporation ❖ kuyanika
Pansi pa mkhalidwe wa vacuum, pangani zinthuzo kuti ziume, monga chitsulo, aloyi yachitsulo, ndi zina zotero. Kenako muziike pamwamba pa substrate, njira yophikira ya evaporation nthawi zambiri imagwiritsa ntchito kukana kutentha, kenako kuphulika kwa ma elekitironi kwa zinthuzo, kuzipangitsa kuti ziume mu gawo la mpweya, kenako kuziyika pamwamba pa substrate, m'mbiri yakale, kuyika kwa nthunzi ya vacuum ndi ukadaulo wakale womwe umagwiritsidwa ntchito mu njira ya PVD.
2, Kupaka utoto wothira
Mpweya umatuluka ndi kuwala pansi pa mikhalidwe yodzaza ndi vacuum (Ar). Pakadali pano maatomu a argon (Ar) amatuluka ndi ma ayoni a nayitrogeni (Ar), ma ayoni amafulumizitsidwa ndi mphamvu yamagetsi, ndikuwononga cholinga cha cathode chomwe chimapangidwa ndi zinthu zokutira, cholingacho chimatulutsidwa ndikuyikidwa pamwamba pa substrate. Ma ayoni omwe amapezeka mu sputter, omwe nthawi zambiri amapezeka ndi kuwala, ali pakati pa 10-2pa mpaka 10Pa, Chifukwa chake tinthu tomwe timatuluka timatha kugongana ndi mamolekyu a mpweya mu chipinda chopanda vacuum akamauluka kupita ku substrate, zomwe zimapangitsa kuti kayendetsedwe kake kakhale kosasinthika ndipo filimu yosungidwayo ikhale yosavuta kukhala yofanana.
3, ion ❖ kuyanika
Pansi pa mikhalidwe ya vacuum, Pansi pa mikhalidwe ya vacuum, Gwiritsani ntchito njira inayake ya plasma ionization kuti ionize pang'ono maatomu a zinthu zokutira kukhala ma ayoni. Nthawi yomweyo maatomu ambiri opanda mphamvu zambiri amapangidwa, omwe amakhala ndi mbali yoyipa pa substrate. Mwanjira imeneyi, ma ayoni amaikidwa pamwamba pa substrate pansi pa mbali yoyipa kwambiri kuti apange filimu yopyapyala.
Nthawi yotumizira: Marichi-23-2023