Therufin injinAn raba tsarin injin zuwa: murfin tururin iska, shafi na sputtering na injin da kuma shafi na ion na injin.
1, Rufin ƙafewar injin
A ƙarƙashin yanayin injin, a sa kayan su ƙafe, kamar ƙarfe, ƙarfe, da sauransu, sannan a ajiye su a saman substrate, hanyar shafa evaporation sau da yawa ana amfani da dumama juriya, sannan a jefar da electron beam na kayan shafa, a sa su ƙafe zuwa yanayin iskar gas, sannan a ajiye su a saman substrate, a tarihi, ajiyar tururin injin shine fasahar da aka yi amfani da ita a hanyar PVD.
2, Shafi mai laushi
Iskar tana fuskantar fitar haske a ƙarƙashin yanayin injin da aka cika da (Ar) A wannan lokacin, ion na atom na argon (Ar) suna shiga cikin ions na nitrogen (Ar), ions ɗin suna hanzarta ta hanyar ƙarfin filin lantarki, kuma suna jefar da maƙasudin cathode wanda aka yi da kayan shafa, za a fitar da abin da ake so a saka a saman substrate. Abubuwan da ke faruwa a cikin murfin sputter, wanda galibi ana samu ta hanyar fitar da haske, suna cikin kewayon 10-2pa zuwa 10Pa. Don haka barbashin sputter suna da sauƙin karo da ƙwayoyin iskar gas a cikin ɗakin injin lokacin da suke tashi zuwa ga substrate, suna sa alkiblar motsi bazuwar kuma fim ɗin da aka ajiye ya zama mai sauƙin daidaitawa.
3, shafi na ion
A ƙarƙashin yanayin injin, A ƙarƙashin yanayin injin, An yi amfani da wata dabarar ionization ta plasma don rage ƙwayoyin halitta masu rufi zuwa ions. A lokaci guda ana samar da ƙwayoyin halitta masu ƙarfi da yawa, waɗanda ke da mummunan ra'ayi akan substrate. Ta wannan hanyar, ana sanya ions a saman substrate a ƙarƙashin zurfin ra'ayi mara kyau don samar da siririn fim.
Lokacin Saƙo: Maris-23-2023