Ni izihe nzira z'imashini zikoresha imashini ikora isuku? Ni iyihe ngingo ikoreshwa?

Itsindagutwikira ibintu mu buryo bw'umwukaUburyo imashini ikora bugabanyijemo ibice bibiri: irangi ryo gutwikira amazi mu buryo bwa vacuum evaporation, irangi ryo gutwikira amazi mu buryo bwa vacuum sputtering na irangi ryo gutwikira amazi mu buryo bwa vacuum ion.

1. Gutwikira umwuka uva mu mwuka

Mu gihe cyo gukoresha imashini isukura, shyira ibikoresho mu kirere, nk'icyuma, icyuma gikozwe mu cyuma, nibindi, hanyuma ubishyire ku buso bwa substrate, uburyo bwo gutwikira mu kirere akenshi bukoresha ubushyuhe burwanya ubukana, hanyuma ugatera amashanyarazi mu kirere, ukabihindura umwuka mu kirere, hanyuma ukabishyira ku buso bwa substrate, mu mateka, ikoranabuhanga ryakoreshejwe mbere mu buryo bwa PVD.

2, Gusiga amavuta

Gazi ishyirwa mu isohoka ry’urumuri munsi y’imiterere y’umwuka wuzuye (Ar). Muri ako kanya, atome za argon (Ar) zishyira iyoni muri iyoni za azote (Ar), iyoni zihuta bitewe n’imbaraga z’amashanyarazi, hanyuma zigatera intego ya cathode ikozwe mu bikoresho byo gusiga, intego izasukwa igategwa hejuru y’ubutaka bw’ubutaka. Iyoni mu icupa ry’urumuri, muri rusange iboneka mu icupa ry’urumuri, iri hagati ya 10-2pa na 10Pa, bityo uduce twasutswe tworoshye guhura n’uturemangingo twa gaze mu cyumba cy’urumuri iyo tugurutse twerekeza kuri substrate, bigatuma icyerekezo cy’ingendo kidahinduka kandi agapira kashyizwemo koroshye kuba kamwe.

3, irangi rya Ion

Mu gihe cy’isuku, mu gihe cy’isuku, hakoreshejwe uburyo runaka bwo gushyiramo ioni mu maraso kugira ngo atome z’ibikoresho byo gusiga zihindurwemo ioni. Muri icyo gihe, atome nyinshi zidafite ingufu nyinshi zikora, zibogamira nabi kuri substrate. Muri ubwo buryo, ioni zishyirwa ku buso bwa substrate munsi y’isuku rikabije kugira ngo hakorwe agahu gato.