Iukugquma kwevacuuminkqubo yomatshini yahlulwe ibe: vacuum evaporation ukutyabeka, vacuum sputtering ukutyabeka kunye vacuum ion ukutyabeka.
1. Ukugquma komphunga
Phantsi kwemeko vacuum, ukwenza izinto evaporated, ezifana intsimbi, ingxubevange yesinyithi, njl ke uwafake phezu substrate umphezulu, indlela yokwaleka umphunga udla ngokusetyenziswa ukufudumeza ukuxhathisa, kwaye ke electron umqadi bombardment yezinto zokwaleka, abenze abe ngumphunga kwisigaba igesi, ngoko idiphozithi kumphezulu substrate, ngokwembali, ukufunxa umphunga esetyenziswa ngaphambili indlela yokufaka i-PV umphunga esetyenziswa ngaphambili.
2. Ukugquma
Irhasi iphantsi kokukhutshwa okukhanyayo phantsi kweemeko zevacuum (i-Ar)-ezaliswe yi-vacuum ngalo mzuzu i-argon (Ar) i-athomu ion kwi-nitrogen ion (Ar), ii-ion zikhawuleziswa ngamandla ommandla wombane, kwaye zibhobhoze i-cathode ekujoliswe kuyo eyenziwe ngezinto zokugquma, ekujoliswe kuyo kuya kugalelwa ngaphandle kwaye kufakwe i-substrate ye-coating ngokubanzi, idiphozithiwe ngokucokisekileyo. ezifunyenwe ngokukhutshwa okukhanyayo, zikuluhlu lwe-10-2pa ukuya kwi-10Pa， Ngoko ke amasuntswana atshabhileyo kulula ukungqubana neemolekyuli zerhasi kwigumbi lokucoca xa ubhabha ukuya kwi-substrate, ukwenza ulwalathiso lwentshukumo lungenamkhethe kwaye ifilim efakwe lula ukuba ifane.
3, Ion ukutyabeka
Ngaphantsi kweemeko zevacuum, Ngaphantsi kwemeko yevacuum, Kusetyenziswe indlela ethile ye-ionization ye-plasma ukuze i-ionize i-athomu yezinto zokugquma zibe yi-ion. Ngelo xesha, ii-athomu ezininzi eziphezulu zamandla angathathi hlangothi ziveliswa, ezithambekele kakubi kwi-substrate.
Ixesha lokuposa: Mar-23-2023