Theho roala ka vacuummochine o arotsoe ka: vacuum evaporation barbotage, vacuum sputtering barbotage le vacuum ion barbotage.
1. Ho roala mouoane oa Vacuum
Tlas'a boemo ba vacuum, etsa lintho tse bonahalang evaporated, tse kang tšepe, motsoako oa tšepe, joalo-joalo ebe beha bona holim'a substrate holim'a metsi, e le mouoane barbotage mokhoa hangata sebelisa ho hanyetsa futhumatsang, 'me joale elektrone Beam bombardment ea thepa barbotage, etsa hore ba evaporated ka khase mohato, ebe depositi holim'a substrate holim'a metsi, historing, vacuum mouoane mokhoa o sebelisoang ke PV pele ho moo.
2. Ho roala ha metsi
Khase e hlahisoa ke khanya e tsoang tlas'a maemo a (Ar)-a tlatsitsoeng ka vacuum Ka nako ena liathomo tsa argon (Ar) li kena ka har'a li-ion tsa nitrogen (Ar), li-ion li potlakisoa ka matla a lebala la motlakase, 'me li hlasela sepheo sa cathode se entsoeng ka thepa ea ho roala, sepheo se tla hasoa ka ntle, ebe se kenngoa ka holim'a metsi ka kakaretso. e fumanoeng ka ho tsoa ha khanya, li ka har'a 10-2pa ho isa ho 10Pa，Kahoo likaroloana tse sputtered li bonolo ho thulana le limolek'hule tsa khase ka phaposing ea vacuum ha li fofa li lebile substrate, li etsa hore tataiso ea motsamao e be e sa reroang le filimi e behiloeng habonolo.
3, ho roala ion
Tlas'a maemo a vacuum, tlas'a boemo ba vacuum, ho sebelisoa mokhoa o itseng oa ionization ea plasma ho etsa karolo ea ionise ea liathomo tsa thepa ea ho roala hore e be li-ion. Ka nako e ts'oanang ho hlahisoa liathomo tse ngata tse matla tse sa nke lehlakore, tse nang le leeme le fosahetseng holim'a substrate.
Nako ea poso: Mar-23-2023