Thezokutira vacuumMakina opangira makina amagawidwa kukhala: zokutira za vacuum evaporation, zokutira za vacuum sputtering ndi zokutira za vacuum ion.
1, Kupaka kwa vacuum evaporation
Pansi pa zingalowe chikhalidwe kupanga zinthu chamunthuyo, monga zitsulo, zitsulo aloyi, etc. ndiye kuwaika pa gawo lapansi, ndi evaporation ❖ kuyanika njira zambiri ntchito kukana Kutentha, ndiyeno elekitironi mtengo bombardment wa zinthu ❖ kuyanika, kupanga iwo chamunthuyo mu gawo mpweya, ndiye gawo lapansi pa gawo lapansi, mbiriyakale, vakuyumu nthunzi ❖ kuyanika njira mafotokozedwe ndi PV kale ntchito mafotokozedwe.
2. Kupaka utoto
Mpweyawo umatenthedwa ndi kuwala pansi pa (Ar) -zodzaza vacuum mikhalidwePanthawiyi ma atomu a argon (Ar) ion mu ayoni ya nayitrogeni (Ar), ma ion amafulumizitsidwa ndi mphamvu yamagetsi, ndikuphulitsa chandamale cha cathode chomwe chimapangidwa ndi zinthu zokutira, chandamalecho chidzaponyedwa pansi ndikuyika pansi, ndikuyika pamwamba pake, ndikuyika pansi. akalandira ndi kuwala kumaliseche, ali mu osiyanasiyana 10-2pa kuti 10Pa，Chotero sputtered particles n'zosavuta kugunda ndi mamolekyu mpweya mu vakuyumu chipinda pamene akuwulukira cha gawo lapansi, kupanga zoyenda malangizo mwachisawawa ndi waikamo filimu yosavuta kukhala yunifolomu.
3, zokutira ion
Pansi pa vacuum mikhalidwe, Pansi pa vacuum, Njira ina ya plasma ionisation kuti isungunuke pang'ono maatomu okutira kukhala ayoni. Nthawi yomweyo maatomu ambiri osalowerera ndale amapangidwa, omwe amakondera molakwika pa gawo lapansi.
Nthawi yotumiza: Mar-23-2023