Nkemkpuchi agụụA na-ekewa usoro igwe n'ime: mkpuchi ikuku evaporation, mkpuchi na-ekpochapụ agụụ na mkpuchi ion.
1, Vacuum evaporation mkpuchi
N'okpuru agụụ ọnọdụ, mee ka ihe evaporated, dị ka metal, metal alloy, wdg wee tinye ha n'elu mkpụrụ n'elu, na evaporation mkpuchi usoro na-ejikarị na-eguzogide kpo oku, na mgbe ahụ, electron doo bombardment nke mkpuchi ihe, mee ka ha evaporated n'ime gas na-adọ, mgbe ahụ nkwụnye ego na mkpụrụ n'elu, akụkọ ihe mere eme, agụụ vapor ụzọ ntinye bụ mbụ nkà na ụzụ na-eji na vacuum.
2, mkpuchi mkpuchi
The gas na-edo onwe ya n'okpuru a na-egbuke egbuke ihapu n'okpuru (Ar) -jupụta agụụ ọnọdụ N'oge a na argon (Ar) atọm ion n'ime nitrogen ion (Ar), The ion na-accelerated site ike nke eletrik eletrik, na bombard na cathode lekwasịrị nke e mere nke mkpuchi ihe, lekwasịrị a ga-sputtered si na-edebe na mkpụrụ n'elu ihe omume, na-nwetara n'ozuzu ions na spu n'elu ihe mkpuchi, nke a na-enweta n'ozuzu ya site n'ike mmụọ nsọ. 10-2pa ka 10Pa , Ya mere, ahụ sputtered ahụ dị mfe ijikọ na gas ụmụ irighiri ihe na agụụ ụlọ mgbe efe kwupụta mkpụrụ, na-eme ngagharị direction random na edebe ihe nkiri mfe ịbụ edo.
3, ion mkpuchi
N'okpuru ọnọdụ agụụ, N'okpuru ọnọdụ agụụ, a na-eji usoro ionization plasma ụfọdụ ionise ihe mkpuchi ihe atom n'ime ion. N'otu oge ahụ, a na-emepụta ọtụtụ atom na-anọpụ iche nke ike dị elu, bụ nke na-adịghị mma na mkpụrụ.
Oge nzipu: Mar-23-2023

