Menene tsarin tafiyar injin shafa ruwa? Menene ka'idar aiki?

Theinjin rufe fuskainji tsari ya kasu kashi: injin evaporation shafi, injin sputtering shafi da injin ion shafi.

1. Vacuum evaporation shafi

A karkashin injin yanayin, sa kayan evaporated, irin su karfe, karfe gami, da dai sauransu sa'an nan saka su a kan substrate surface, da evaporation shafi hanya ne sau da yawa amfani da juriya dumama, sa'an nan electron katako bombardment na shafi abu, sa su evaporated cikin gas lokaci, sa'an nan ajiya a kan substrate surface, tarihi, injin tururi jijiya shi ne a baya fasahar amfani da a cikin injin daskarewa.

2.Sputtering shafi

The iskar da aka hõre wani haske fitarwa a karkashin (Ar) -cika injin yanayi A wannan lokacin da argon (Ar) zarra ion cikin nitrogen ions (Ar), The ions suna kara da karfi na lantarki filin, da bombard da cathode manufa wanda aka sanya daga shafi abu, da manufa za a sputtered fitar da ajiye a kan substrate surface abin da ya faru, da kewayon spu samu a cikin kewayon. 10-2pa to 10Pa ， Don haka sputtered barbashi suna da sauƙin yin karo tare da kwayoyin gas a cikin dakin injin lokacin da suke tashi zuwa ga substrate, yin jagorar motsi bazuwar kuma fim ɗin da aka ajiye cikin sauƙi ya zama uniform.

3. ion shafi

A karkashin injin yanayi, A karkashin injin yanayi, Yi amfani da wani plasma ionisation dabara zuwa partially ionise da shafi abu atom a cikin ions.A lokaci guda da yawa high makamashi tsaka tsaki atom da aka samar, wanda aka barnatar da son zuciya a kan substrate.Ta wannan hanya, ions ana ajiye a kan substrate surface karkashin wani zurfin korau son zuciya don samar da wani bakin ciki fim.