Inkqubo Ukuhamba koMatshini wokuGcoba ngeSputtering

1. Isiseko sokucoca ibhombu

1.1) Umatshini wokugquma usebenzisa i-glow discharge ukucoca i-substrate. Oko kukuthi, faka igesi ye-argon kwigumbi, i-discharge voltage imalunga ne-1000V, Emva kokuvula umbane, kuvela i-glow discharge, kwaye i-substrate icocwe nge-argon ion bombardment.

1.2) Kwiimashini zokugquma ezikhupha izinto zokuhombisa ezivelisa izinto zokuhombisa eziphezulu kwimizi-mveliso, ii-ion ze-titanium ezikhutshwa yimithombo emincinci ye-arc zisetyenziswa kakhulu ekucoceni. Umatshini wokugquma uxhotyiswe ngomthombo omncinci we-arc, kwaye umsinga we-ion ye-titanium kwi-plasma ye-arc eveliswa kukukhupha komthombo omncinci we-arc usetyenziselwa ukuqhumisa nokucoca i-substrate.

2. Ukwaleka nge-titanium nitride

Xa kufakwa iifilimu ezincinci ze-titanium nitride, izinto ekujoliswe kuzo zokutshiza yithagethi ye-titanium. Izinto ekujoliswe kuzo ziqhagamshelwe kwi-electrode engalunganga yombane wokutshiza, kwaye i-voltage ekujoliswe kuyo yi-400 ~ 500V; I-argon flux izinzile, kwaye i-vacuum yokulawula yi-(3 ~ 8) x10^-1PA. I-substrate iqhagamshelwe kwi-electrode engalunganga yombane we-bias, ene-voltage eyi-100 ~ 200V.

Emva kokuvula umbane wethagethi ye-titanium etshizayo, kuvela ukukhupha ukukhanya, kwaye ii-ion ze-argon ezinamandla aphezulu zihlasela ithagethi etshizayo, zikhupha iiathom ze-titanium kwithagethi.

I-nitrogen yegesi yokusabela iyangeniswa, kwaye ii-athomu ze-titanium kunye ne-nitrogen zenziwa i-ions ze-titanium kunye nee-ions ze-nitrogen kwigumbi lokugquma. Phantsi kokutsalwa yintsimi yombane ye-negative bias esetyenziswa kwi-substrate, ii-ion ze-titanium kunye nee-ion ze-nitrogen ziyakhawuleza ziye kumphezulu we-substrate ukuze ziphendule ngamakhemikhali kwaye zenze umaleko wefilimu ye-titanium nitride.

3. Susa i-substrate

Emva kokufikelela kubukhulu obumiselweyo befilimu, cima umbane okhupha amanzi, umbane obangela ukuba i-substrate ingasebenzi kakuhle, kunye nomthombo womoya. Emva kokuba ubushushu be-substrate buphantsi kwe-120 ℃, gcwalisa igumbi lokugquma ngomoya uze ukhuphe i-substrate.

Eli nqaku lipapashwe nguumenzi womatshini wokugquma i-magnetron– Guangdong Zhenhua.