Te Rere Tukanga o te Mīhini Paninga Sputtering

1. Papa horoi pupuhi

1.1) Ka whakamahia e te mīhini paninga pupuhi te tukunga kanapa hei horoi i te papa. Arā, ka utaina te hau argon ki roto i te rūma, ko te ngaohiko tukunga he tata ki te 1000V. I muri i te tahuritanga o te pūtake hiko, ka puta he tukunga kanapa, ā, ka horoia te papa mā te pupuhi i te katote argon.

1.2) I roto i ngā mīhini paninga whakapūpū e hanga ana i ngā whakapaipai papai i roto i te ahumahi, ko ngā katote titanium e tukuna ana e ngā pūtake pewa iti te nuinga o te wā e whakamahia ana mō te horoi. He pūtake pewa iti kei roto i te mīhini paninga whakapūpū, ā, ko te awa katote titanium i roto i te plasma pewa i hangaia e te tukunga pūtake pewa iti ka whakamahia hei pupuhi me te horoi i te papa.

2. Paninga nitride titanium

I te wā e tāpaetia ana ngā kiriata angiangi o te titanium nitride, ko te rauemi ūnga mō te pupuhi ko te titanium ūnga. Ka honoa te rauemi ūnga ki te irahiko kino o te pūtake hiko pupuhi, ā, ko te ngaohiko ūnga he 400~500V; he pumau te rerenga argon, ā, ko te korehau whakahaere he (3~8) x10^-1PA. Kua honoa te papa ki te irahiko kino o te pūtake hiko whakahāngai, me te ngaohiko o te 100~200V.

I muri i te whakakā i te pūtake hiko o te ūnga titanium e pupuhi ana, ka puta he rerenga kanapa, ā, ka pupuhihia te ūnga e pupuhi ana e ngā katote argon kaha-teitei, ka pupuhihia ngā ngota titanium mai i te ūnga.

Ka whakaurua te hauota hau tauhohenga, ā, ka whakakoitia ngā ngota titanium me te hauota ki roto i te rūma paninga hei katote titanium me ngā katote hauota. I raro i te kukume a te papa hiko whakahāngai kino e pā ana ki te papa, ka tere haere ngā katote titanium me ngā katote hauota ki te mata o te papa mō te tauhohenga matū me te whakatakotoranga hei hanga i tētahi paparanga kiriata titanium nitride.

3. Tangohia te papa

Kia tae ki te matotoru o te kiriata kua whakaritea, whakawetohia te pūtake hiko pupuhi, te pūtake hiko pīrori o te papa, me te pūtake hau. Kia iti iho te pāmahana o te papa i te 120 ℃, whakakīia te rūma paninga ki te hau, ka tangohia te papa.

Nākaihanga mīhini paninga magnetron sputtering– Guangdong Zhenhua.