Usoro usoro nke igwe mkpuchi Sputtering

1. Ihe nhicha bọmbụ

1.1) Igwe mkpuchi sputtering na-eji ihe na-enwu gbaa iji hichaa ihe na-enwu gbaa. Nke ahụ pụtara, chajie gas argon n'ime ụlọ ahụ, voltaji mwepụta dị ihe dịka 1000V. Mgbe ọ gbanyechara ọkụ eletrik ahụ, a na-emepụta ihe na-enwu gbaa, a na-ejikwa ihe na-enwu gbaa argon ion hichaa ihe na-enwu gbaa.

1.2) N'ime igwe mkpuchi sputtering nke na-emepụta ihe ịchọ mma dị elu n'ụlọ ọrụ mmepụta ihe, a na-ejikarị ion titanium nke obere isi mmalite arc na-ewepụta eme ihe maka nhicha. Igwe mkpuchi sputtering nwere obere isi mmalite arc, a na-ejikwa iyi titanium ion dị na plasma arc nke obere isi mmalite arc na-emepụta mee ihe iji mee ka ihe dị n'ime ya dị ọcha ma hichaa ihe ndị dị n'ime ya.

2. Mkpuchi Titanium nitride

Mgbe a na-etinye ihe nkiri titanium nitride dị gịrịgịrị, ihe e ji eme ka ọ gbaa ọkụ bụ ihe e ji eme ka ọ gbaa ọkụ. Ihe e ji eme ka ọ gbaa ọkụ na-ejikọta ya na elektrọd na-adịghị mma nke ike ọkụ, voltaji ebumnuche bụ 400~500V; a na-edozi ọkụ argon, oghere njikwa ahụ dịkwa (3~8) x10.^-1PA. A na-ejikọ ihe nkwado ahụ na elektrọd na-adịghị mma nke ike ọkụ eletrik, yana voltaji nke 100 ~ 200V.

Mgbe ọ gbanyere ọkụ eletrik nke ihe mgbaru ọsọ titanium na-agbapụta, a na-emepụta ihe na-egbukepụ egbukepụ, ion argon dị ike dị elu na-awakpo ihe mgbaru ọsọ sputtering ahụ, na-agbasa atọm titanium site na ihe mgbaru ọsọ ahụ.

A na-ewebata nitrogen gas mmeghachi omume, a na-agbanwe atọm titanium na nitrogen ka ha ghọọ ion titanium na ion nitrogen n'ime ụlọ mkpuchi. N'okpuru ndọta nke oghere eletriki na-adịghị mma nke etinyere na substrate ahụ, ion titanium na ion nitrogen na-agba ọsọ gaa n'elu ihe mkpuchi ahụ maka mmeghachi omume kemịkalụ na ntinye iji mepụta oyi akwa fim titanium nitride.

3. Wepụ ihe mkpuchi ahụ

Mgbe ị ruru ọkpụrụkpụ ihe nkiri ahụ a kara aka, gbanyụọ ọkụ eletrik na-agbapụta, ọkụ eletrik na-adịghị mma nke substrate, na isi iyi ikuku. Mgbe okpomọkụ substrate ahụ dị ala karịa 120 ℃, jupụta ụlọ mkpuchi ahụ na ikuku wee wepụ ihe substrate ahụ.

E bipụtara akụkọ a site n'akamagnetron sputtering mkpuchi igwe emeputa- Guangdong Zhenhua.