1. Gusukura ubutaka bwo mu bwoko bwa bombe
1.1) Imashini ikoresha imashini isohora urumuri ikoresha imashini isohora urumuri kugira ngo isukure imashini. Ni ukuvuga ko, ishyira umwuka wa argon mu cyumba, voltage yo gusohora imashini iba hafi 1000V, nyuma yo gufungura amashanyarazi, imashini isohora urumuri irakorwa, hanyuma imashini isukurwa na argon ion bombardment.
1.2) Mu mashini zikora imitako igezweho mu nganda, ioni za titaniyumu zisohoka mu mashini nto zikoreshwa cyane mu gusukura. Imashini ikora imitako ifite isoko nto ya arc, kandi umugezi wa titaniyumu muri plasma ya arc ivamo imashini nto isohora arc ikoreshwa mu gusasa no gusukura substrate.
2. Gusiga titanium nitride
Mu gushyiramo filime nto za titanium nitride, ibikoresho bigamije guteresha ni titanium. Ibikoresho bigamije guteresha bihujwe na electrode mbi y'amashanyarazi akoreshwa mu guteresha, kandi voltage yabyo ni 400 ~ 500V; Argon flux irahamye, kandi imashini igenzura ni (3 ~ 8) x10-1PA. Substrate ihujwe na electrode negative y'amashanyarazi ya bias, ifite voltage ya 100 ~ 200V.
Nyuma yo gufungura ingufu z'ikintu gikoresha titaniyumu, havuka urumuri, maze iyoni za argon zifite ingufu nyinshi zigatera ikintu gikoresha titaniyumu, zigatera atome za titaniyumu mu kintu gikoresha.
Azote ihumeka umwuka w’impinduka irashyirwamo, maze atome za titaniyumu na azote bishyirwamo iyoni za titaniyumu na azote mu cyumba cyo gutwikira. Mu gihe cyo gukururwa n’umurima w’amashanyarazi uterwa n’ingufu, iyoni za titaniyumu na azote byihuta bigera ku buso bw’umubumbe kugira ngo habeho uburyo bwo gukora no gushyiramo urwego rwa filime ya titaniyumu.
3. Kuramo substrate
Umaze kugera ku bunini bwa firime bwagenwe, zimya umuriro utanga amazi, umuriro utanga amazi ugabanya ingufu, n'aho umwuka uturuka. Ubushyuhe bumaze kuba munsi ya 120 ℃, wuzuze umwuka mu cyumba gikingira hanyuma ukuremo uwo mwuka.
Iyi nkuru yasohotse nauruganda rukora imashini zikora irangi rya magnetron- Guangdong Zhenhua.
Igihe cyo kohereza: Mata-07-2023