Tsamaiso ea Phallo ea Sputtering Coating Machine

1. Sebaka sa ho hloekisa ka libomo

1.1) Mochini o koahelang ka ho qhala o sebelisa ho ntša ha khanya ho hloekisa substrate. Ke hore, ho tjhaja khase ea argon ka kamoreng, motlakase oa ho ntša o ka ba 1000V, Kamora ho bulela phepelo ea motlakase, ho ntša ha khanya hoa hlahisoa, 'me substrate e hloekisoa ka ho phatloha ha li-ion tsa argon.

1.2) Mechining ea ho koahela ka ho phunya e hlahisang mekhabiso ea maemo a holimo indastering, li-ion tsa titanium tse ntšoang ke mehloli e menyenyane ea arc li sebelisoa haholo bakeng sa ho hloekisa. Mochini oa ho koahela ka ho phunya o na le mohloli o monyenyane oa arc, 'me molapo oa ioni oa titanium o plasma ea arc o hlahisoang ke ho ntša ha mohloli o monyenyane oa arc o sebelisetsoa ho hlasela le ho hloekisa substrate.

2. Seaparo sa titanium nitride

Ha ho kenngwa difilimi tse tshesane tsa titanium nitride, thepa e rerilweng bakeng sa ho phunya ke sepheo sa titanium. Thepa e rerilweng e hokahantswe le electrode e mpe ya phepelo ya motlakase wa ho phunya, mme motlakase o rerilweng ke 400~500V; Mocheso wa argon o tsitsitse, mme vacuum ya taolo ke (3~8) x10^-1PA. Substrate e hokahantsoe le electrode e mpe ea phepelo ea motlakase ea bias, ka motlakase oa 100 ~ 200V.

Kamora ho bulela phepelo ea motlakase ea sepheo sa titanium se qhalang, ho hlahisoa ho phatloha ha khanya, 'me li-ion tsa argon tse nang le matla a mangata li hlasela sepheo sa ho qhala, li ntša liathomo tsa titanium ho tsoa sepheong.

Naetrojene ea khase ea karabelo ea hlahisoa, 'me liathomo tsa titanium le naetrojene li ionized ho ba li-ion tsa titanium le li-ion tsa naetrojene ka phapusing ea ho koahela. Tlas'a ho hoheloa ke tšimo ea motlakase e nang le leeme le lebe e sebelisitsoeng ho substrate, li-ion tsa titanium le li-ion tsa naetrojene li potlaka ho ea holimo ho substrate bakeng sa karabelo ea lik'hemik'hale le ho kenngoa ho etsa lera la filimi ea titanium nitride.

3. Ntša substrate

Kamora ho fihlela botenya ba filimi bo reriloeng esale pele, tima phepelo ea motlakase e qhalanang, phepelo ea motlakase e khethollang substrate, le mohloli oa moea. Kamora hore mocheso oa substrate o be tlase ho 120 ℃, tlatsa kamore ea ho koahela ka moea 'me u ntše substrate.

Sengoloa sena se phatlalalitsoe kemoetsi oa mochini oa ho roala oa magnetron sputtering– Guangdong Zhenhua.