Socodka Geeddi-socodka ee Mashiinka Dahaadhka Sputtering

1. Nadiifinta bambooyinka

1.1) Mashiinka dahaarka ee sputtering wuxuu isticmaalaa dheecaan dhalaalaya si uu u nadiifiyo substrate-ka. Taas macnaheedu waa, ku dallac gaaska argon qolka, danabku waa qiyaastii 1000V. Ka dib marka la shido korontada, dheecaan dhalaalaya ayaa la soo saaraa, substrate-kana waxaa lagu nadiifiyaa bamgareynta argon ion.

1.2) Mashiinnada dahaarka ee warshadaha ku sameeya qurxinta heerka sare ah, ion-yada titanium-ka ee ay soo saaraan ilo yar yar ayaa inta badan loo isticmaalaa nadiifinta. Mashiinka dahaarka ee dahaarka waxaa ku qalabaysan ilo yar oo qaanso ah, durdurka ion-ka titanium-ka ee ku jira balaasmaha qaanso ee ay soo saarto dheecaanka isha qaanso ee yar ayaa loo isticmaalaa in lagu duqeeyo oo lagu nadiifiyo substrate-ka.

2. Dahaarka nitride-ka Titanium

Marka la dhigayo filimaan khafiif ah oo titanium nitride ah, walxaha bartilmaameedka u ah in la shubo waa bartilmaameedka titanium. Walxaha bartilmaameedka ah waxay ku xiran yihiin elektroodka taban ee korontada ku shaqeysa, danabka bartilmaameedkuna waa 400~500V; qulqulka argon-ka waa mid go'an, faakuumka xakamayntana waa (3~8) x10^-1PA. Substrate-ku wuxuu ku xiran yahay elektroodka taban ee korontada ee eexda, oo leh danab dhan 100 ~ 200V.

Ka dib marka la shido korontada bartilmaameedka titanium-ka ee buufinaya, waxaa soo baxaya dheecaan dhalaalaya, aayoonnada argon-ka ee tamarta sare leh ayaa duqeeya bartilmaameedka buufinaya, iyagoo ka soo saaraya atamka titanium-ka bartilmaameedka.

Naytrojiinka gaaska falgalka ayaa la soo saaraa, atamka titanium-ka iyo nitrogen-kana waxaa lagu shubaa ion-yada titanium-ka iyo ion-yada nitrogen-ka qolka dahaadhka. Soo jiidashada goobta korontada ee taban ee lagu dabaqay substrate-ka, ion-yada titanium-ka iyo ion-yada nitrogen-ka ayaa si degdeg ah ugu soo degta dusha sare ee substrate-ka si loogu sameeyo falgal kiimiko iyo kaydin si loo sameeyo lakab filim titanium nitride ah.

3. Soo saar substrate-ka

Ka dib marka aad gaarto dhumucda filimka la go'aamiyay, dami korontada ku shubaysa, korontada ku shubaysa substrate-ka, iyo isha hawada. Ka dib marka heerkulka substrate-ku ka hooseeyo 120 ℃, ku buuxi qolka dahaadhka hawo oo ka saar substrate-ka.

Maqaalkan waxaa daabacaysoo saaraha mashiinka daahan sputtering magnetron- Guangdong Zhenhua.