Njira Yoyendera Makina Opopera Sputtering

1. Chitsulo chotsukira mabomba

1.1) Makina opaka utoto amagwiritsa ntchito kutulutsa kuwala kuti ayeretse gawo lapansi. Izi zikutanthauza kuti, lowetsani mpweya wa argon m'chipindamo, mphamvu yotulutsa imakhala pafupifupi 1000V, Pambuyo poyatsa magetsi, kutulutsa kuwala kumapangidwa, ndipo gawo lapansi limayeretsedwa ndi bombardment ya argon ion.

1.2) Mu makina opaka utoto omwe amapanga zokongoletsera zapamwamba kwambiri, ma ayoni a titaniyamu omwe amatulutsidwa ndi magwero ang'onoang'ono a arc amagwiritsidwa ntchito kwambiri poyeretsa. Makina opaka utotowo amakhala ndi gwero laling'ono la arc, ndipo mtsinje wa ayoni wa titaniyamu mu plasma ya arc yomwe imapangidwa ndi kutulutsa kwa gwero laling'ono la arc umagwiritsidwa ntchito kuphulitsa ndikuyeretsa gawo lapansi.

2. Chophimba cha titaniyamu ndi nitride

Mukayika mafilimu opyapyala a titanium nitride, chinthu chofunikira kwambiri pothira ndi titanium target. Chinthucho chimalumikizidwa ndi electrode yoyipa ya magetsi othira, ndipo voteji yake ndi 400 ~ 500V; Argon flux imakhazikika, ndipo chotsukira chowongolera ndi (3 ~ 8) x10.^-1PA. Chigawocho chimalumikizidwa ndi electrode yoyipa ya magetsi a bias, ndi voteji ya 100 ~ 200V.

Pambuyo poyatsa mphamvu ya titaniyamu yotulutsa madzi, kuwala kumatuluka, ndipo ma ayoni amphamvu kwambiri a argon amaukira chinthucho, ndikutulutsa maatomu a titaniyamu kuchokera pa chinthucho.

Mpweya wa nayitrogeni umalowetsedwa, ndipo maatomu a titaniyamu ndi nayitrogeni amasinthidwa kukhala ma ayoni a titaniyamu ndi ma ayoni a nayitrogeni m'chipinda chophikira. Pansi pa kukopa kwa mphamvu yamagetsi yoipa yomwe imagwiritsidwa ntchito ku substrate, ma ayoni a titaniyamu ndi ma ayoni a nayitrogeni amafulumira kupita pamwamba pa substrate kuti apange mawonekedwe a mankhwala ndi kuyikapo gawo la filimu ya titaniyamu nitride.

3. Chotsani pansi

Mukafika pa makulidwe a filimu yomwe mwasankha, zimitsani magetsi otulutsa mpweya, magetsi oteteza nthaka, ndi gwero la mpweya. Kutentha kwa nthaka kukakhala kotsika kuposa 120 ℃, dzazani chipinda chophikira ndi mpweya ndikuchotsa nthaka.

Nkhaniyi yafalitsidwa ndiwopanga makina opaka utoto wa magnetron– Guangdong Zhenhua.