1. Umshini wokumboza i-ion ye-cathode engenalutho kanye nomshini wokumboza i-ion ye-arc wire eshisayo
Isibhamu se-cathode esingenalutho kanye nesibhamu se-arc esishisayo sifakwe phezulu kwegumbi lokumboza, i-anode ifakwe phansi, kanti ama-coil amabili e-electromagnetic afakwe phezulu nangaphansi komphetho wegumbi lokumboza. I-electron yokukhanya kwe-arc igeleza isuka phezulu iye phansi ukuze yenze ukunyakaza komugqa ojikelezayo.
2. Uzibuthe ohlala njalo kanye nokulawula kwe-electromagnetic komthombo omncane we-arc we-cathode oyindilinga
Ikhoyili kagesi isheshisa indawo ye-arc ukuze yenze ukunyakaza okujikelezayo endaweni ezungezile yendawo eqondiwe, okunciphisa isikhathi sokuhlala kwendawo ye-arc ebusweni bendawo eqondiwe, kunciphisa indawo yedamu elincibilikisiwe futhi kuthuthukise ukuhlelwa kwengqimba yefilimu.
3. Umthombo we-arc we-cathodic olawulwa ngogesi ophindwe kabili
Umthombo we-cathodic arc ufakwe ama-coil amabili kagesi, okuthuthukisa isivinini sokujikeleza kokugeleza kwama-electron futhi kuthuthukise ukuhlelwa kwengqimba yefilimu.
4. I-Magnetron Cyclotron PECVD
Kufakwe amakhoyili amabili kagesi ngaphandle kwegumbi lokumboza le-DC PECVD ukuze kwenziwe ama-electron ajikeleze, okwandisa amathuba okushayisana phakathi kwama-electron negesi, futhi kuthuthukise izinga lokuhlukana kwezinhlayiya ezingqimbeni zefilimu.
5. I-ECR Microwave PECVD
Ekamelweni lokumboza ngaphandle, okufakwe phezulu nangaphansi ngamakhoyili amabili kagesi, kungathuthukisa izinga lokuhlukaniswa.
6. I-Arc Light Discharge PECVD
Ekamelweni lokumboza imishini ye-PECVD yokukhipha i-arc ezungeze ukufakwa okuphezulu nokungaphansi kwama-coil amabili kagesi, ukufakwa kwefilimu yedayimane, insimu ye-electromagnetic ye-coaxial ingajikeleziswa ukugeleza kwe-electron ye-arc ukuze kukhuthazwe i-ionization yegesi yama-hydrocarbon.
–Lesi sihloko sikhishwe yi-umenzi womshini wokumboza nge-vacuumI-Guangdong Zhenhua
Isikhathi sokuthunyelwe: Okthoba-24-2023