1. Injin shafa ion mai ramin cathode da injin shafa ion mai zafi
An sanya bindigar cathode mai rami da bindigar baka mai zafi a saman ɗakin rufewa, an sanya anode a ƙasa, sannan an sanya coils guda biyu na lantarki a sama da ƙasan ɗakin rufewa. Wutar lantarki mai haske tana gudana daga sama zuwa ƙasa don yin motsi na layin karkace.
2. Magnet na dindindin tare da ikon sarrafa lantarki na ƙaramin tushen baka na cathode mai zagaye
Na'urar lantarki tana hanzarta wurin baka don yin motsi mai juyawa a cikin kewayen abin da aka nufa, wanda ke rage lokacin zama na wurin baka a saman abin da aka nufa, yana rage yankin wurin narkakken kuma yana inganta tsarin layin fim ɗin.
3. Tushen baka na cathodic mai sarrafa lantarki guda biyu
Tushen arc na cathodic yana da na'urori biyu na lantarki, wanda ke inganta saurin juyawa na kwararar lantarki da kuma inganta tsarin Layer na fim.
4. Magnetron Cyclotron PECVD
An sanya na'urorin lantarki guda biyu a wajen ɗakin rufewa na DC PECVD don sa electrons su juya, wanda ke ƙara yiwuwar karo tsakanin electrons da iskar gas, kuma yana inganta ƙimar rabuwar ƙwayoyin cuta a cikin layin fim ɗin.
5.ECR Microwave PECVD
A cikin ɗakin rufi a waje da aka sanya sama da ƙasa tare da na'urorin lantarki guda biyu, ana iya inganta ƙimar rabuwa.
6. Fitar da Hasken Arc PECVD
A cikin ɗakin rufe kayan aikin PECVD da ke kewaye da saman da ƙasa na na'urorin lantarki guda biyu, ajiyar fim ɗin lu'u-lu'u, za a iya juya filin lantarki na coaxial ta hanyar amfani da iskar gas ta ionization na hydrocarbons.
– An fitar da wannan labarin ne dagainjin shafa injin injinGuangdong Zhenhua
Lokacin Saƙo: Oktoba-24-2023