1. Lub tshuab txheej ion cathode hollow thiab lub tshuab txheej ion kub kub
Lub phom cathode hollow thiab rab phom arc hot wire raug ntsia rau saum lub chamber txheej, lub anode raug ntsia rau hauv qab, thiab ob lub electromagnetic coils raug ntsia rau saum thiab hauv qab ntawm lub chamber txheej. Arc lub teeb electron ntws los ntawm sab saud mus rau hauv qab kom ua kab sib dhos.
2. Cov hlau nplaum tas mus li ntxiv rau kev tswj hwm electromagnetic ntawm qhov chaw me me cathode arc
Lub kauj hluav taws xob electromagnetic ua kom qhov chaw arc ua haujlwm nrawm dua los ua qhov kev txav mus los hauv qhov ncig ntawm lub hom phiaj, uas txo lub sijhawm nyob ntawm qhov chaw arc ntawm qhov chaw ntawm lub hom phiaj, txo thaj chaw ntawm lub pas dej molten thiab txhim kho lub koom haum txheej zaj duab xis.
3. Dual electromagnetic tswj cathodic arc qhov chaw
Lub cathodic arc qhov chaw nruab nrog ob lub electromagnetic coils, uas txhim kho qhov ceev ntawm kev sib hloov ntawm electron ntws thiab txhim kho cov txheej txheem zaj duab xis.
4. Magnetron Cyclotron PECVD
Ob lub kauj hlau nplaum hluav taws xob tau teeb tsa sab nraum lub DC PECVD txheej chamber kom cov electrons tig, uas ua rau muaj feem cuam tshuam ntawm kev sib tsoo ntawm cov electrons thiab cov roj, thiab txhim kho qhov kev sib cais ntawm cov khoom me me hauv txheej zaj duab xis.
5. ECR Microwave PECVD
Hauv lub chamber txheej sab nraum lub ntsia sab saud thiab sab qis nrog ob lub electromagnetic coils, tuaj yeem txhim kho qhov kev sib cais.
6. Arc Lub Teeb Tso Tawm PECVD
Hauv lub arc discharge PECVD khoom siv txheej chamber nyob ib puag ncig sab saud thiab qis dua ntawm ob lub electromagnetic coils, deposition ntawm pob zeb diamond zaj duab xis, lub coaxial electromagnetic teb tuaj yeem tig arc electron ntws los txhawb cov roj ionization ntawm hydrocarbons.
– Tsab xov xwm no yog tso tawm los ntawmlub tshuab nqus tsev txheej tshuab chaw tsim khoomGuangdong Zhenhua
Lub sijhawm tshaj tawm: Lub Kaum Hli-24-2023