1. Imashini ikingira ikoresheje icyuma gikingira imyuka ya cathode n'imashini ikingira ikoresheje icyuma gishyushye
Imbunda ya cathode ifite ubudodo n'imbunda ishyushye ya arc ishyirwa hejuru y'icyumba cyo gukingira, anode ishyirwa hasi, kandi hashyizweho imiyoboro ibiri ya electromagnetic hejuru no hepfo y'icyumba cyo gukingira. Electron y'urumuri rwa arc iva hejuru ijya hasi kugira ngo ikore ingendo z'umurongo uzunguruka.
2. Sukuru ihoraho hamwe n'igenzura rya electromagnetic ry'isoko nto ya cathode arc
Umuyoboro wa elegitoroniki wihutisha ahantu hazunguruka kugira ngo hakore ingendo zizenguruka mu ruziga rw'ikintu, ibi bigabanya igihe cyo gutura ahantu hazunguruka ku buso bw'ikintu, bigabanya ubuso bw'ikidendezi cyashongeshejwe kandi bikanatunganya imiterere y'urukuta rwa filime.
3. Isoko y'arc ya cathodic igenzura amashanyarazi abiri
Isoko ya arc ya cathodic ifite imiyoboro ibiri ya electromagnetic, ituma umuvuduko wo kuzenguruka kwa electron urushaho kwiyongera kandi ikanonosora imiterere y'urutonde rwa filime.
4. Magnetron Cyclotron PECVD
Hashyizweho imiyoboro ibiri ya elegitoronike hanze y’icyumba cyo gusigamo DC PECVD kugira ngo electron zizunguruke, ibyo byongera amahirwe yo kugongana hagati ya electron na gaze, kandi bikongera umuvuduko wo kwitandukanya kw'uduce turi mu gice cya filime.
5.ECR Microwave PECVD
Mu cyumba cyo gusigamo irangi hanze, hejuru no hepfo hashyizweho imiyoboro ibiri ya elegitoroniki, bishobora kongera umuvuduko wo kwitandukanya.
6. PECVD yo gusohora urumuri rw'umurambararo
Mu cyumba cyo gutwikira ibikoresho bya PECVD gikikije hejuru n'inyuma y'aho imiyoboro ibiri ya electromagnetic ishyirwa, aho diyama ishyirwa, umuyoboro wa electromagnetic wa coaxial ushobora kuzunguruka ukoresheje electron ya arc kugira ngo hakorwe ioni ya hydrocarbon.
–Iyi nkuru yasohotse nauruganda rukora imashini zikora imashini zikoresha umwuka ushyushyeGuangdong Zhenhua
Igihe cyo kohereza: Ukwakira-24-2023