1. Umatshini wokugquma i-ion ye-cathode engenanto kunye nomatshini wokugquma i-ion ye-arc wire eshushu
Isibhamu se-cathode esingenanto kunye nesibhamu se-arc esinocingo olushushu zifakwe phezulu kwigumbi lokugquma, i-anode ifakwe ezantsi, kwaye kufakwe ii-coils ezimbini ze-electromagnetic phezulu nasezantsi komda wegumbi lokugquma. I-electron yokukhanya kwe-arc ihamba ukusuka phezulu ukuya ezantsi ukuze yenze intshukumo yomgca ojikelezayo.
2. Imagnethi esisigxina kunye nolawulo lwe-electromagnetic lomthombo omncinci we-arc ye-cathode ejikelezayo
Ikhoyili ye-electromagnetic ikhawulezisa indawo ye-arc ukuze yenze intshukumo ejikelezayo kumjikelo wethagethi, nto leyo enciphisa ixesha lokuhlala kwendawo ye-arc kumphezulu wethagethi, inciphisa indawo yedama elinyibilikisiweyo kwaye iphucula ulungelelwaniso lwemaleko yefilimu.
3. Umthombo we-arc ye-cathodic yokulawula i-electromagnetic kabini
Umthombo we-cathodic arc uxhotyiswe ngee-coils ezimbini ze-electromagnetic, eziphucula isantya sokujikeleza kwe-electron kwaye ziphucula ulungelelwaniso lwe-film layer.
4. I-Magnetron Cyclotron PECVD
Iikhoyili ezimbini ze-electromagnetic zifakelwe ngaphandle kwegumbi lokugquma le-DC PECVD ukuze zenze ii-electron zijikeleze, nto leyo eyandisa amathuba okungqubana phakathi kwee-electron kunye negesi, kwaye iphucula izinga lokuqhekeka kwamasuntswana kumaleko wefilimu.
5.ECR Microwave PECVD
Kwigumbi lokugquma elingaphandle, elingaphezulu nelisezantsi lifakelwe iikhoyili ezimbini ze-electromagnetic, linokuphucula izinga lokuqhekeka.
6. I-Arc Light Discharge PECVD
Kwigumbi lokugquma izixhobo ze-PECVD zokukhupha i-arc ezijikeleze ukufakelwa okuphezulu nokusezantsi kweekhoyili ezimbini ze-electromagnetic, ukufakwa kwefilimu yedayimani, intsimi ye-electromagnetic ye-coaxial ingajikeleziswa ukuhamba kwe-arc electron ukukhuthaza i-ionization yegesi yee-hydrocarbons.
–Eli nqaku likhutshwe nguumenzi womatshini wokugquma nge-vacuumGuangdong Zhenhua
Ixesha lokuthumela: Okthobha-24-2023