1. Muchina wekufukidza ion we Hollow cathode uye muchina wekufukidza ion wearc wire unopisa
Pfuti ye cathode ine hollow cathode ne hot wire arc gun zvakaiswa pamusoro pe coating chamber, anode yakaiswa pasi, uye ma electromagnetic coil maviri akaiswa pamusoro nepazasi pe coating chamber periphery. Arc light electron inoyerera kubva kumusoro kuenda pasi kuti iite spiral line movement.
2. Magineti inogara iripo pamwe nekudzora kwemagetsi kwenzvimbo diki yedenderedzwa ye cathode arc
Iyo electromagnetic coil inokurumidzisa nzvimbo ye arc kuti iite kufamba kwerotary mudenderedzwa rechinangwa, izvo zvinoderedza nguva yekugara kwenzvimbo ye arc pamusoro pechinangwa, zvinoderedza nzvimbo yedziva rakanyungudutswa uye zvinonatsiridza kurongeka kwechikamu chefirimu.
3. Dual electromagnetic control cathodic arc source
Nzvimbo ye cathodic arc ine ma coil maviri e electromagnetic, izvo zvinovandudza kumhanya kwekutenderera kwema electron uye zvinogadzirisa kurongeka kwechikamu chefirimu.
4. Magnetron Cyclotron PECVD
Makoiri maviri emagetsi anoiswa kunze kwekamuri reDC PECVD rekuvhara kuti maerekitironi atenderere, izvo zvinowedzera mukana wekusangana pakati pemaerekitironi negasi, uye zvinovandudza mwero wekupatsanurwa kwezvikamu zviri muchikamu chefirimu.
5.ECR Microwave PECVD
Mukamuri rekufukidza kunze, rakaiswa repamusoro nerepasi rine macoil maviri emagetsi, rinogona kuvandudza mwero wekuparadzanisa.
6. Kuburitsa Mwenje weArc PECVD
Mukamuri rekufukidza michina yePECVD inoburitsa arc yakatenderedza kuiswa kwepamusoro nepazasi kwema coil maviri e electromagnetic, kuiswa kwefirimu redhaimani, munda we coaxial electromagnetic unogona kutenderedzwa ne arc electron flow kuti ukurudzire ionization yegasi re hydrocarbons.
–Chinyorwa ichi chakaburitswa namugadziri wemuchina wevacuum coatingGuangdong Zhenhua
Nguva yekutumira: Gumiguru-24-2023