1. Igwe mkpuchi kathode oghere na igwe mkpuchi waya arc ion ọkụ
A na-etinye egbe katode oghere na egbe waya ọkụ n'elu ụlọ mkpuchi ahụ, a na-etinye anode n'ala, a na-etinyekwa eriri electromagnetic abụọ n'elu na ala nke akụkụ ụlọ mkpuchi ahụ. Elektrọn ọkụ arc na-asọ site n'elu ruo ala iji mee mmegharị ahịrị gburugburu.
2. Magnet na-adịgide adịgide yana njikwa elektrọnik nke obere isi iyi arc kathode gburugburu
Igwe eletriki na-eme ka ebe arc ahụ dị ngwa iji mee mmegharị gburugburu ebe a na-elekwasị anya, nke na-ebelata oge obibi nke ebe arc ahụ n'elu ihe mgbaru ọsọ ahụ, na-ebelata mpaghara nke ọdọ mmiri gbazere agbaze ma na-eme ka nhazi oyi akwa ihe nkiri ahụ ka mma.
3. Isi iyi arc nke kathodic njikwa electromagnetic abụọ
Isi iyi nke arc cathodic nwere eriri electromagnetic abụọ, nke na-eme ka ọsọ ntụgharị nke mbugharị elektrọn ka mma ma na-eme ka nhazi oyi akwa ihe nkiri ahụ ka mma.
4. Magnetron Cyclotron PECVD
A na-etinye eriri electromagnetic abụọ n'èzí ụlọ mkpuchi DC PECVD iji mee ka elektrọn ndị ahụ na-agbagharị, nke na-eme ka ohere nke nkwekọ n'etiti elektrọn na gas dịkwuo elu, ma na-eme ka ọnụego nkewa nke ihe ndị dị na oyi akwa ihe nkiri ahụ ka mma.
5.ECR Ngwa Ngwa Ngwa PECVD
N'ime ụlọ mkpuchi dị n'èzí arụnyere elu na ala na eriri eletriki abụọ, enwere ike ime ka ọnụego nkesa dịkwuo mma.
6. Nkwụsị ọkụ Arc PECVD
N'ime ụlọ mkpuchi ngwa PECVD nke a na-ewepụta n'elu na ala nke eriri eletriki abụọ, ebe a na-etinye ihe nkiri diamond, enwere ike ịtụgharị oghere electromagnetic coaxial arc iji kpalite ionization gas nke hydrocarbons.
–E bipụtara akụkọ a site n'aka onyeigwe mkpuchi igwe emeputa ihe mkpuchiGuangdong Zhenhua
Oge ozi: Ọktoba-24-2023